Alan Jerome Thomas

US Patent:

63032759, Oct 16, 2001

Filed:

Feb 10, 2000

Appl. No.:

9/501653

Inventors:

Robert A. Coles - Manassas VA
John W. Golz - Nelsonville NY
Qinghuang Lin - Mt. Kisco NY
Alan C. Thomas - Hughsonville NY
Christopher J. Waskiewicz - Poughkeepsie NY
Teresa J. Wu - Poughkeepsie NY

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G03C 500

US Classification:

430320

Abstract:

A method of forming a resist layer of uniform thickness across a surface patterned with a varying density of high aspect ratio features. A selected material layer having an affinity to a resist coat to be applied over the selected material layer is applied to a wafer having a plurality of recesses before applying a resist coat. After the resist coat is applied over the selected material layer, the selected material diffuses partially into the resist coat to condition a portion of the resist coat to be insoluble in the presence of a developer which is applied after the resist coat. Those portions of the resist coat into which the selected material layer has not diffused then are removed by a developer leaving a uniform resist coat thickness across the wafer.

US Patent:

49065645, Mar 6, 1990

Filed:

Mar 13, 1987

Appl. No.:

7/025741

Inventors:

Jeffery A. Lyon - Silver Spring MD
Jeffrey L. Chulay - Washington DC
Alan W. Thomas - Silver Spring MD
Russell J. Howard - Los Altos Hills CA
James L. Weber - Marshfield WI

Assignee:

The United States of America as represented by the Secretary of the Army - Washington DC

International Classification:

G01N 33561
G01N 33569

US Classification:

435 7

Abstract:

A method provides peptides that are antigenic determinants identified by antibodies obtained using intact pathogenic agents that present a restricted set of antigens to surveillance by the immune system.