Vice President & General Counsel at Reis, Inc. - 2007-present Owner/Principal at Alex Simpson PLLC - 2005-2008 Partner at King & Spalding LLP - 2002-2004 Associate at Davis Polk & Wardwell - 1993-2002
Education:
Duke University School of Law Degree - J.D. Graduated - 1993 Dartmouth College Degree - B.A. - Government Graduated - 1989
William C. Allison - Beaverton OR, US Diane Scott - Portland OR, US Ping Huang - Eden Prairie MN, US Richard Frentzel - Murrieta CA, US Alexander William Simpson - Hillsboro OR, US
Assignee:
NexPlanar Corporation - Hillsboro OR
International Classification:
B24D 11/00 B24D 3/00 B24D 18/00
US Classification:
51293, 451537
Abstract:
Methods of fabricating polishing pads with end-point detection regions for polishing semiconductor substrates using eddy current end-point detection are described.
Polishing Pad For Eddy Current End-Point Detection
William C. Allison - Beaverton OR, US Diane Scott - Portland OR, US Ping Huang - Eden Prairie MN, US Richard Frentzel - Murrieta CA, US Alexander William Simpson - Hillsboro OR, US
Assignee:
NexPlanar Corporation - Hillsboro OR
International Classification:
B24D 3/28
US Classification:
451526, 451528, 451921, 451 6, 451287
Abstract:
Polishing pads for polishing semiconductor substrates using eddy current end-point detection are described. Methods of fabricating polishing pads for polishing semiconductor substrates using eddy current end-point detection are also described.
Homogeneous Polishing Pad For Eddy Current End-Point Detection
William C. Allison - Beaverton OR, US Diane Scott - Portland OR, US Ping Huang - Eden Prairie MN, US Richard Frentzel - Murrieta CA, US Alexander William Simpson - Hillsboro OR, US
International Classification:
B24D 11/00 B24D 3/20 B24D 18/00
US Classification:
451526, 51293, 51296
Abstract:
Homogeneous polishing pads for polishing semiconductor substrates using eddy current end-point detection are described. Methods of fabricating homogeneous polishing pads for polishing semiconductor substrates using eddy current end-point detection are also described.
Polishing Pad With Concentric Or Approximately Concentric Polygon Groove Pattern
William C. Allison - Beaverton OR, US Diane Scott - Portland OR, US Alexander William Simpson - Hillsboro OR, US
International Classification:
B24D 11/00 B24D 13/14 B24D 18/00
US Classification:
451527, 51298, 51296
Abstract:
Polishing pads with concentric or approximately concentric polygon groove patterns are described. Methods of fabricating polishing pads with concentric or approximately concentric polygon groove patterns are also described.
Polishing Pad With Foundation Layer And Polishing Surface Layer
William C. Allison - Beaverton OR, US Diane Scott - Portland OR, US Paul Andre Lefevre - Portland OR, US James P. LaCasse - Portland OR, US Alexander William Simpson - Hillsboro OR, US
International Classification:
B24D 7/00 B24D 18/00 B24D 11/00
US Classification:
451539, 451550, 51298, 51296
Abstract:
Polishing pads with foundation layers and polishing surface layers are described. In an example, a polishing pad for polishing a substrate includes a foundation layer. A polishing surface layer is bonded to the foundation layer. Methods of fabricating polishing pads with a polishing surface layer bonded to a foundation layer are also described.
Polishing Pad With Polishing Surface Layer Having An Aperture Or Opening Above A Transparent Foundation Layer
Paul Andre Lefevre - Portland OR, US William C. Allison - Beaverton OR, US James P. LaCasse - Portland OR, US Diane Scott - Portland OR, US Alexander William Simpson - Hillsboro OR, US Ping Huang - Beaverton OR, US Leslie M. Charns - Portland OR, US
International Classification:
B24D 11/00 B24D 18/00
US Classification:
451529, 451527, 51298, 51296
Abstract:
Polishing pads with a polishing surface layer having an aperture or opening above a transparent foundation layer are described. In an example, a polishing pad for polishing a substrate includes a foundation layer having a global top surface and a transparent region. A polishing surface layer is attached to the global top surface of the foundation layer. The polishing surface layer has a polishing surface and a back surface. An aperture is disposed in the polishing pad from the back surface through to the polishing surface of the polishing surface layer, and aligned with the transparent region of the foundation layer. The foundation layer provides an impermeable seal for the aperture at the back surface of the polishing surface layer. Methods of fabricating such polishing pads are also described.
Polishing Pad Having Polishing Surface With Continuous Protrusions
- Hillsboro OR, US William C. ALLISON - Beaverton OR, US Alexander William SIMPSON - Hillsboro OR, US Diane SCOTT - Portland OR, US Ping HUANG - Beaverton OR, US Leslie M. CHARNS - Portland OR, US James Richard RINEHART - Portland OR, US Robert KERPRICH - Portland OR, US
International Classification:
B24B 37/26 B24B 37/22
Abstract:
Polishing pads having a polishing surface with continuous protrusions are described. Methods of fabricating polishing pads having a polishing surface with continuous protrusions are also described.
Polishing Pad With Concentric Or Approximately Concentric Polygon Groove Pattern
William C. Allison - Beaverton OR, US Diane Scott - Portland OR, US Alexander William Simpson - Hillsboro OR, US
International Classification:
B24B 37/26 B24D 11/00
Abstract:
Polishing pads with concentric or approximately concentric polygon groove patterns are described. Methods of fabricating polishing pads with concentric or approximately concentric polygon groove patterns are also described.