Allen M Jones

US Patent:

60502835, Apr 18, 2000

Filed:

Apr 16, 1998

Appl. No.:

9/051304

Inventors:

Joe G. Hoffman - Cardiff CA
R. Scot Clark - Fallbrook CA
Allen H. Jones - Prescott AZ

Assignee:

Air Liquide America Corporation - Houston TX

International Classification:

G05D 1113

US Classification:

137 3

Abstract:

A system and method for mixing and/or diluting ultrapure fluids, such as liquid acids, for semiconductor processing. The system includes first and second chemical dispensers, the first and second chemical dispensers adapted to contain first and second fluids to be mixed, respectively; a process connection between the first and second chemical dispensers which allows the first and second fluids to flow therethrough and intermingle to form a mixed fluid, the process connection further allowing the mixed fluid to flow to a location needed by the operator; and an ultrasonic wave emitting device provided in a location sufficient to transmit an ultrasonic wave through the mixed fluid, the device including means to measure the velocity of the wave through the mixed fluid, and thus indirectly measure a ratio defined by a quantity of the first chemical to a quantity of the second chemical in the mixed fluid.

US Patent:

48286605, May 9, 1989

Filed:

Oct 6, 1986

Appl. No.:

6/915776

Inventors:

R. Scot Clark - Fallbrook CA
Joe G. Hoffman - Oceanside CA
John B. Davison - Mission Viejo CA
Alan W. Jones - San Clemente CA
Allen H. Jones - Carlsbad CA
David W. Persichini - Oceanside CA
Wallace I. Yuan - Carlsbad CA
Bruce A. Lipisko - Carlsbad CA

Assignee:

Athens Corporation - Oceanside CA

International Classification:

C25B 128
B01D 314

US Classification:

204 82

Abstract:

A continuous process and apparatus for the repurification of ultrapure liquids. An oxidant solution comprising ultrapure sulfuric acid, peroxydisulfuric acid, and ultrapure water is continuously withdrawn from a process after use. The withdrawn oxidant is reprocessed continuously by contacting with alumina to remove fluoride ions. Water is continuously separated or stripped from the oxidant solution by heating the solution and bubbling an inert gas therethrough causing the water to vaporize from the solution. The separated oxidant is continuously distilled and condensed to form a purified stream of sulfuric acid. The major portion of this stream is continuously returned to the process. The remaining minor portion is continuously cooled, subjected to analysis for purity, and diluted with ultrapure water. The diluted sulfuric acid is further cooled prior to electrochemical treatment in the anode compartment of an electrochemical cell.

US Patent:

48550230, Aug 8, 1989

Filed:

Apr 19, 1988

Appl. No.:

7/183089

Inventors:

R. Scot Clark - Fallbrook CA
Joe G. Hoffman - Oceanside CA
John B. Davison - Mission Viejo CA
Alan W. Jones - San Clemente CA
Allen H. Jones - Carlsbad CA
David W. Persichini - Oceanside CA
Wallace I. Yuan - Irvine CA
Bruce A. Lipisko - Carlsbad CA

Assignee:

Athens, Inc. - Oceanside CA

International Classification:

C25F 500

US Classification:

204130

Abstract:

An improved wafer cleaning process wherein a novel oxidant solution comprising ultrapure sulfuric acid, peroxydisulfuric acid, and ultrapure water used in a semiconductor wafer cleaning process is continuously withdrawn after use. The withdrawn oxidant is reprocessed continuously by contacting with alumina to remove fluoride ions. Water is continuously separated or stripped from the oxidant solution by heating the solution and bubbling an inert gas therethrough. The separated oxidant is continuously distilled and condensed to form a purified stream of sulfuric acid. The major portion of this stream is continuously returned to the wafer cleaning process. The remaining minor portion is continuously cooled, subjected to analysis for purity, and diluted with ultrapure water prior to electrochemical treatment in the anode compartment of an electrochemical cell. This converts at least a portion of the dilute sulfuric acid to peroxydisulfuric acid. The resulting solution is continuously returned to the wafer cleaning process to be mixed with the major portion of the purified sulfuric acid.

US Patent:

51640490, Nov 17, 1992

Filed:

Aug 22, 1990

Appl. No.:

7/571250

Inventors:

R. Scot Clark - Fallbrook CA
John B. Davison - Laguna Hills CA
David W. Persichini - Oceanside CA
Wallace I. Yuan - Irvine CA
Bruce A. Lipisko - Encinitas CA
Alan W. Jones - Mountain View CA
Allen H. Jones - Scottsdale AZ
Joe G. Hoffman - Carlsbad CA

Assignee:

Athens Corporation - Oceanside CA

International Classification:

B01D 314
C01B 1790

US Classification:

203 40

Abstract:

Method for the production of ultrapure sulfuric acid including distillation of sulfuric acid material for the removal of soluble impurities and insoluble and non-volatile particles of 10 microns to 0. 2 micron or less in size. Reprocessing is also provided. Distillation takes place in a distillation chamber having walls which are provided with means within the chamber to provide smooth convective upward flow of distilling liquid and vapor proximate the walls and means for smooth convective downward flow substantially centrally of the distillation chamber. Redirection means and packing together with reflux means insure the washing of rising vapor and direct the condensing vapor substantially centrally of the distillation chamber. Ultrapure sulfuric acid is also provided having 5 or less particles per cubic centimeter of a size of 0. 5 micron and larger and less than 10 ppb of any specific trace impurity such as cations.