Amir Wachs from 1651 New Brunswick Ave, Sunnyvale, CA 94087, age 55, Phone: 4087491230

Amir Wachs Phones & Addresses

Name / Title

Company / Classification

Phones & Addresses

Amir Wachs
Manager

Applied Materials Inc
Electronic Parts and Equipment

3050 Bowers Ave # Ms1818, Santa Clara, CA 95054

Manufacture Of Ultra-Clean Surfaces By Selective
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US Patent:

20060060213, Mar 23, 2006
Filed:

May 13, 2005
Appl. No.:

11/128215
Inventors:

Walter Huber - Sunnyvale CA, US
John Krueger - Albuquerque NM, US
Yoram Uziel - Yodfat, IL
Amir Wachs - Sunnyvale CA, US
International Classification:

C23G 1/00
US Classification:

134002000
Abstract:

A method and apparatus for removing surface impurities from a surface of a material, particularly silicon wafers, includes identifying the location of at least one impurity particle on a surface of the material and applying a liquid to the surface in the vicinity of the at least one impurity particle. The liquid is explosively evaporated to remove the surface particle as part of the evaporation of the liquid. The apparatus can include a source of humidified gas for the liquid and a laser apparatus to provide the heat for liquid evaporation.