Andrew Scott Cornelius

US Patent:

20140044503, Feb 13, 2014

Filed:

Aug 7, 2013

Appl. No.:

13/961538

Inventors:

Steve Szudarski - Fremont CA, US
Andrew Scott Cornelius - San Jose CA, US
Amitabh Puri - San Jose CA, US
Michael Robert Rice - Pleasanton CA, US
Jeffrey C. Hudgens - San Francisco CA, US
Steven V. Sansoni - Livermore CA, US
Robert Irwin Decottignies - Redwood City CA, US
Dean C. Hruzek - Cedar Park TX, US
Peter Irwin - Austin TX, US
Nir Merry - Mountain View CA, US

International Classification:

H01L 21/677

US Classification:

414217

Abstract:

In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.