Andrew William O'Sullivan

US Patent:

46749390, Jun 23, 1987

Filed:

Jul 30, 1984

Appl. No.:

6/635384

Inventors:

George A. Maney - Palo Alto CA
Andrew W. O'Sullivan - Gilroy CA
W. George Faraco - Saratoga CA

Assignee:

ASYST Technologies - Fremont CA

International Classification:

B65B 6900
B65G 6534

US Classification:

414292

Abstract:

The present invention is an apparatus for maintaining articles, such as semiconductor wafers clean. The wafers or other articles to be processed are placed in a box having first and second regions for making first and second seals. A box door seals the articles into the box. The box has a second region for making the second seal and has a third region for making a third seal. The box is used to transport the wafers to a port in the canopy of the processing equipment. The port is adapted for receiving the box and box door and for transferring the box door and the contents of the box into a region beneath the canopy. The canopy has a first region for making the first seal with the box. Also, the canopy has a fourth region surrounding the port for making a fourth seal. A port door is provided for closing the canopy port when no box is present.

US Patent:

46767096, Jun 30, 1987

Filed:

Aug 26, 1985

Appl. No.:

6/769709

Inventors:

Anthony C. Bonora - Menlo Park CA
Andrew W. O'Sullivan - Gilroy CA

Assignee:

Asyst Technologies - Fremont CA

International Classification:

B65G 6500

US Classification:

414217

Abstract:

Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical interface (SMIF) system. The container is supported on an interface port on the canopy of the processing station and has a removeable door on which the cassette is supportable. A first platform is transportable along a shaft below the interface port and is operable to mate with the interface port and receive the cassette from the container. The first platform is transported down the shaft, thereby removing the cassette from the container. A second platform mounted in the shaft includes a manipulator arm which swings to engage the cassette on the first platform and support the cassette off of the first platform. The manipulator arm then pivots to transport the cassette to a location in the processing station away from the shaft. The first platform is then transported back up the shaft to the interface port to seal the container to prevent particulate contamination.

US Patent:

48028096, Feb 7, 1989

Filed:

Apr 20, 1987

Appl. No.:

7/049393

Inventors:

Anthony C. Bonora - Menlo Park CA
Andrew W. O'Sullivan - Gilroy CA

Assignee:

Asyst Technologies - Milpitas CA

International Classification:

B65G 6500

US Classification:

414217

Abstract:

The present invention provides an apparatus for transferring a cassette holding articles to be processed to and from a container supported at a processing station where the processing station has a cassette port for receiving the cassette when the cassette moves along a central axis extending from outside the processing station through the cassette port, and into the processing station, said apparatus comprising: a platform device including a cassette platform transportable substantially along the central axis for transferring the cassette to and from the container substantially along the central axis; a manipulator device including a first member extending substantially orthogonal to the central axis, the first member including a first portion and a second portion; a pivoting arm including a pivoting portion and a coupling portion, the pivoting portion mounted pivotally adjacent to the second portion of the first member, the pivoting arm operable to pivot about a pivot axis extending substantially through the pivoting portion and substantially perpendicular to the central axis; a coupling device mounted on the coupling portion of the pivoting arm for coupling to the cassette; and a tilt device for tilting the coupling device and the cassette coupled thereto during pivoting by said pivoting arm, such that during the pivoting the cassette tilts relative to the central axis.