Andrew J Ray

US Patent:

6989545, Jan 24, 2006

Filed:

Jul 7, 2004

Appl. No.:

10/886308

Inventors:

Robert D. Rathmell - Murphy TX, US
Douglas A. Brown - Peabody MA, US
Andrew M. Ray - Newburyport MA, US

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

H01J 37/317

US Classification:

25049221, 250397, 250398, 2504921, 2504922, 2504923

Abstract:

The present invention facilitates semiconductor device fabrication by obtaining angle of incidence values and divergence of an ion beam normal to a plane of a scanned beam. A divergence detector comprising a mask and profiler/sensor is employed to obtain beamlets from the incoming ion beam and then to measure beam current at a number of vertical positions. These beam current measurements are then employed to provide the vertical angle of incidence values, which provide a vertical divergence profile that serves to characterize the ion beam. These values can be employed by an ion beam generation mechanism to perform adjustments on the generated ion beam or position of the workpiece if the values indicate deviation from desired values.

US Patent:

20210058386, Feb 25, 2021

Filed:

Aug 19, 2019

Appl. No.:

16/544351

Inventors:

- Arlington VA, US
Andrew Lee RAY - Southlake TX, US
James D. SHANNON - Jackson NJ, US
Scott KURZWEG - Westerville OH, US
David TAFT - Keller TX, US
Thomas W. HAYNES - Concord CA, US
Maria G. LAM - Oakland CA, US
Theresa Marie RIVERA - Cranford NJ, US
Shane RONAN - Lutz FL, US
Abhitabh KUSHWAHA - Tampa FL, US
Sankaran RAMANATHAN - Bridgewater NJ, US

International Classification:

H04L 29/06
G06F 21/36
H04W 28/26

Abstract:

A device may receive data relating to a site plan and image data relating to a network device. The device may determine a device identifier based on the image data, associate the device identifier with the site plan based on a common attribute between the network device and the site plan, and cause a certificate to be generated based on an authentication request to a network controller. The authentication request may cause the network controller to generate the certificate based on the device identifier and/or the site plan. The device may cause an Internet protocol (IP) address to be assigned to the network device based on the certificate, a location of the network device, and/or another related parameter, cause a node configuration to be generated based on the IP address, the device identifier, and/or the site plan, and provision the network device according to the node configuration.