Anthony G Liepert

US Patent:

6764288, Jul 20, 2004

Filed:

Nov 6, 2003

Appl. No.:

10/703852

Inventors:

Anthony G. Liepert - Lincoln MA
Jeffrey C. Warren - Westford MA

Assignee:

Varian, Inc. - Palo Alto CA

International Classification:

F04C 1800

US Classification:

418 555, 418 5, 418 6, 418 551

Abstract:

Vacuum pumping apparatus includes a scroll set having an inlet and an outlet. The scroll set includes a first stationary scroll blade and a second stationary scroll blade extending from a stationary plate and separated by a gap, and an orbiting scroll extending from an orbiting plate, wherein the first and second stationary scroll blades are intermeshed with the orbiting scroll blade to define one or more interblade pockets. The vacuum pumping apparatus further includes a relief port in the gap between the first and second stationary scroll blades and coupled through a relief passage to an exhaust, a relief valve in the relief passage, and a drive mechanism operatively coupled to the orbiting scroll element for producing orbiting motion of the orbiting scroll blade relative to the first and second stationary scroll blades.

US Patent:

6884047, Apr 26, 2005

Filed:

Oct 20, 2003

Appl. No.:

10/689169

Inventors:

Anthony G. Liepert - Lincoln MA, US
Jeffrey C. Warren - Westford MA, US

Assignee:

Varian, Inc. - Palo Alto CA

International Classification:

F01C001/02

US Classification:

418 551, 418 552, 418 5

Abstract:

A compact scroll pump includes a scroll set having an inlet and an outlet, and a drive mechanism. The scroll set includes a stationary scroll blade extending from a stationary plate and an orbiting scroll blade extending from an orbiting plate. The stationary and orbiting scroll blades are intermeshed together to define one or more interblade pockets. The orbiting scroll blade is located on a first side of the orbiting plate, and the drive mechanism is operatively coupled to a second side of the orbiting plate for producing orbiting motion of the orbiting scroll blade relative to the stationary scroll blade. The drive mechanism includes a motor and a crankshaft having an axis of rotation, and an orbiting bearing coupled between the crankshaft and the orbiting plate. The scroll set is configured such that an imaginary plane perpendicular to the axis of rotation passes through the orbiting bearing and at least a portion of the orbiting scroll blade.

US Patent:

7189066, Mar 13, 2007

Filed:

May 14, 2004

Appl. No.:

10/845991

Inventors:

Anthony G. Liepert - Lincoln MA, US

Assignee:

Varian, Inc. - Palo Alto CA

International Classification:

F01C 1/30
F03C 2/00
F04C 2/00

US Classification:

418 5, 418 551, 418 552, 4182011, 73 407, 73 492

Abstract:

A vacuum pumping system includes a primary vacuum pump having an inlet for coupling to a system, and a secondary vacuum pump having an inlet coupled to the exhaust of the primary vacuum pump. The primary vacuum pump is an oil-free, positive displacement vacuum pump having multiple clearance seals between the inlet and the exhaust. The primary vacuum pump may be a scroll vacuum pump, and the secondary vacuum pump may be an oil-free diaphragm pump. The system may include a valve coupled to the exhaust of the primary vacuum pump and configured to couple the exhaust of the primary vacuum pump to an interpump exhaust in response to a selected condition, such as the pressure level at the exhaust of the primary vacuum pump.

US Patent:

7244113, Jul 17, 2007

Filed:

Oct 7, 2004

Appl. No.:

10/960673

Inventors:

Anthony G. Liepert - Lincoln MA, US
Jeffrey C. Warren - Westford MA, US

Assignee:

Varian, Inc. - Palo Alto CA

International Classification:

F01C 1/02

US Classification:

418 551, 418 553, 4152161

Abstract:

Vacuum pumping apparatus includes a pump frame, a stationary scroll element secured to the pump frame, the stationary scroll element including a stationary scroll blade, an orbiting scroll element including an orbiting scroll blade intermeshed with the stationary scroll blade, a motor secured to the pump frame, and a crankshaft coupled between the motor and the orbiting scroll element for producing orbiting movement of the orbiting scroll blade relative to the stationary scroll blade when the motor is energized. The crankshaft includes a first component having a first coefficient of thermal expansion and a second component having a second coefficient of thermal expansion.

US Patent:

7497110, Mar 3, 2009

Filed:

Feb 28, 2007

Appl. No.:

11/712135

Inventors:

Anthony G. Liepert - Lincoln MA, US

Assignee:

Varian, Inc. - Palo Alto CA

International Classification:

G01M 3/04

US Classification:

73 407

Abstract:

A leak detector includes a leak detector inlet to receive a test gas, a vacuum pump coupled to the leak detector inlet, a test gas sensing unit connected through a passage to the leak detector inlet, to sense the test gas, a membrane that is permeable to the test gas, the membrane disposed in the passage between the leak detector inlet and the test gas sensing unit, and a control mechanism to substantially terminate transmission of the test gas through the membrane in a time of 500 milliseconds or less. In other embodiments, the control mechanism substantially terminates transmission of the test gas through the membrane in a time of 100 milliseconds or less.

US Patent:

7779528, Aug 24, 2010

Filed:

Sep 5, 2008

Appl. No.:

12/205642

Inventors:

Anthony G. Liepert - Lincoln MA, US

Assignee:

Virian, Inc. - Santa Clara CA

International Classification:

B23P 17/00
G01M 3/04

US Classification:

29592, 73 407

Abstract:

A leak detector includes a leak detector inlet to receive a test gas; a vacuum pump coupled to the leak detector inlet; a test gas sensing unit connected through a passage to the leak detector inlet; and a membrane that is permeable to the test gas disposed in the passage between the leak detector inlet and the test gas sensing unit, the membrane having a permeance to the test gas that varies by less than five percent over a temperature range of T−20K to T+20K, where Tis a design temperature. In addition, methods are provided for making a composite membrane that includes a semi-permeable membrane and a porous membrane. Furthermore, a reference leak, which includes a composite membrane is provided.

US Patent:

7261528, Aug 28, 2007

Filed:

Mar 30, 2004

Appl. No.:

10/812520

Inventors:

Anthony G. Liepert - Lincoln MA, US
Sean E. Plaisted - Newburyport MA, US

Assignee:

Varian, Inc. - Palo Alto CA

International Classification:

F03C 2/00
F03C 4/00

US Classification:

418 553, 418 551, 464102

Abstract:

Scroll pumping apparatus includes a first scroll element and a second scroll element, a drive mechanism operatively coupled to the second scroll element for producing orbiting motion of the second scroll element relative to the first scroll element, and a synchronization device including a strip having connected, substantially flat sections, coupled between the first scroll element and the second scroll element. The synchronization device may have a generally square configuration.

US Patent:

20050063850, Mar 24, 2005

Filed:

Sep 18, 2003

Appl. No.:

10/666100

Inventors:

Anthony Liepert - Lincoln MA, US
Jeffrey Warren - Westford MA, US

International Classification:

F03C002/00
F04C018/00

US Classification:

418055400, 418055100

Abstract:

Vacuum pumping apparatus includes a scroll set having an inlet and an outlet, the scroll set including a stationary scroll element and an orbiting scroll element, and a drive mechanism for producing orbiting motion of the orbiting scroll element relative to the stationary scroll element. The vacuum pumping apparatus further includes a bellows assembly coupled between a first stationary component of the apparatus and the orbiting scroll element so as to isolate a first volume inside the bellows assembly and a second volume outside the bellows assembly. One end of the bellows assembly is free to rotate during motion of the orbiting scroll element. The apparatus also includes a synchronization mechanism coupled between the orbiting scroll element and a second stationary component of the apparatus. The synchronization mechanism is located within the first volume.