Benjamin B Larson

US Patent:

20220247934, Aug 4, 2022

Filed:

Jan 26, 2022

Appl. No.:

17/585222

Inventors:

- Morrisville NC, US
John Damiano, JR. - Holly Springs NC, US
David P. Nackashi - Raleigh NC, US
Daniel Stephen Gardiner - Wake Forest NC, US
Mark Uebel - Morrisville NC, US
Alan Philip Franks - Durham NC, US
Benjamin Jacobs - Apex NC, US
Joshua Brian Friend - Raleigh NC, US
Katherine Elizabeth Marusak - Cary NC, US
Benjamin Bradshaw Larson - Cary NC, US

International Classification:

H04N 5/232
G06T 7/215
G06T 7/33

Abstract:

Methods and systems for calibrating a transmission electron microscope are disclosed. A fiducial mark on the sample holder is used to identify known reference points so that a current collection area and a through-hole on the sample holder can be located. A plurality of beam current and beam area measurements are taken, and calibration tables are extrapolated from the measurements for a full range of microscope parameters. The calibration tables are then used to determine electron dose of a sample during an experiment at a given configuration.