Michael Hatzakis - Chappaqua NY Juri R. Paraszczak - Pleasantville NY Bennett Robinson - New York NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
B44C 122 C03C 1500 C03C 2506
US Classification:
156643
Abstract:
It has been discovered surprisingly that when a plasma is produced by exciting a gas or mixture of gases with microwaves and simultaneously also with a radio frequency electrical discharge, that the resulting plasma is much more highly chemically reactive than a plasma produced instead by only one of the excitations. Such a plasma etches a surface much faster than the sum of the etch rates produced by each of the excitations individually and the etching anisotropy may be controlled by varying the ratio of the applied power of each of the two kinds of simultaneous excitation.
Fletcher Jones - Ossining NY Kenneth J. Muroski - Millbrook NY Bennett Robinson - New York NY
Assignee:
International Business Machines Corporation Inc. - Armonk NY
International Classification:
H01L 2100
US Classification:
216 37
Abstract:
Processes for producing and using a novel CVD apparatus for depositing silicon layers onto suitable substrates and for the in-situ etching removal of background silicon deposits from the interior walls of the apparatus. The invention comprises using an apparatus having a fused quartz reaction chamber and precoating the interior wall of the reaction chamber with a thin continuous barrier layer of Al. sub. 2 O. sub. 3 which is inert to the etching gas introduced for the removal of the background silicon deposits.
Name / Title
Company / Classification
Phones & Addresses
Bennett Robinson CEO
ROBINSON KURTIN COMMUNICATIONS! INC
201 E 42 St FL 22, New York, NY 343 E 30 St, New York, NY
Our Kitchen Sep 2008 - Oct 2010
Chief Executive Officer
Raise the Bar Sep 2008 - Oct 2010
Executive Director at Raise the Bar
Education:
John F. Kennedy University 1993 - 1997
Masters, Master of Arts, Psychology
San Jose State University 1972 - 1976
Bachelors, Bachelor of Arts, Psychology