Bruce G Walker

US Patent:

6517594, Feb 11, 2003

Filed:

Apr 4, 2001

Appl. No.:

09/806798

Inventors:

W. Karl Olander - Indian Shores FL
Bruce G. Walker - Kuna ID

Assignee:

Advanced Technology Materials, Inc. - Danbury CT

International Classification:

B01D 4600

US Classification:

553852, 553851, 55DIG 18, 55DIG 29, 95273, 454187

Abstract:

An air manager and/or chemical containment apparatus, for environmental control of fumes from wet bench units of semiconductor manufacturing facilities. The air manager system is suitable for installation in an open architecture wet bench or an enclosed mini-environment wet bench, and includes an air source and an air exhaust arranged for flowing air across an open chemical tank, to entrain fumes from chemical in the tank that otherwise may migrate from the immediate vicinity of the tank, and transport such fumes to the exhaust with the air flowed from the air source to the exhaust. The chemical containment apparatus includes: (1) a thin film member including at least one solid portion and at least one cut-out portion; (2) a first scroll member positioned at one side of the thin film member for rotatorily moving the thin film member; (3) a motive driver operatively connected to the first scroll member for rotating the first scroll member; and (4) optionally, a second scroll member positioned at the other side of said thin film member for rotatorily receiving said thin film in synchrony with movement of the first scroll member.

US Patent:

6280507, Aug 28, 2001

Filed:

Feb 29, 2000

Appl. No.:

9/515485

Inventors:

Bruce Walker - Kuna ID

Assignee:

Advanced Technology Materials, Inc. - Danbury CT

International Classification:

B01D 4600

US Classification:

95273

Abstract:

An air manager for the containment of hazardous fumes over a liquid chemical tank in exhausted equipment and systems in a clean room. A powered, filtered airflow source forces filtered air through a plenum coextensive with a transverse dimension of the chemical tank, in a sheet-like airflow stream over the liquid surface. The airflow is captured at the opposite side of the liquid chemical tank and directed to a powered exhaust. The air manager works cooperatively with the clean room laminar airflow, dramatically increasing the efficiency of the local exhaust. Critical Capture Velocity over the entire surface of the tank is maintained, assuring complete containment of chemical fumes. Optional airflow guides positioned along the sides of the chemical tank may be employed to confine the air stream to the area over the liquid surface.