Burgess G Gudmundson

US Patent:

50338340, Jul 23, 1991

Filed:

Jan 30, 1989

Appl. No.:

7/302777

Inventors:

Loren D. Corder - Melba ID
Burgess G. Gudmundson - Boise ID

Assignee:

Micron Technology, Inc. - Boise ID

International Classification:

G02B 700
G02B 2100

US Classification:

350529

Abstract:

Apparatus to convert a single-mount SEM microscope stage into a multi-mount SEM microscope stage. The apparatus interfits onto the conventional center-aperture SEM microscope stage, and provides a mounting face having apertures for multiple-specimen mounts. The device is able to provide top or side views of the specimen with only a 45. degree. rotation of the microscope stage from its starting point.