Byunggon G Lee

US Patent:

20100300259, Dec 2, 2010

Filed:

May 27, 2010

Appl. No.:

12/789226

Inventors:

BYUNGGON LEE - Andover MA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

B26D 3/08

US Classification:

83879

Abstract:

Embodiments of the present invention provide an accurate method for marking substrates for individual substrate identification and tracking during a solar cell fabrication process. In one embodiment, each crystalline silicon ingot is marked on at least two sides via a scribing technique. In one embodiment, each crystalline silicon ingot is marked on three sides via a scribing technique. The ingots are then sliced into individual substrates, which retain the clearly visible and robust markings on the sides of the substrate. In one embodiment, the markings are detected by images captured by a moderate resolution camera at desired locations through a solar cell production line. In one embodiment, the markings are manually readable at one or more desired points throughout the solar cell production process. In general, the combination of markings uniquely identifies each individual substrate, the ingot from which the substrate was sliced, and the location within the ingot from which the substrate was obtained.