Carl I Nelson

US Patent:

59001267, May 4, 1999

Filed:

Jun 3, 1996

Appl. No.:

8/660195

Inventors:

Carl W. Nelson - Hayward CA
Richard D. Weir - Agoura Hills CA

Assignee:

Tulip Memory Systems, Inc.

International Classification:

C23C 1434

US Classification:

2041922

Abstract:

An improved magnetic-recording disk and a process for manufacturing magnetic-recording disks are disclosed. A precision cold-rolled authentic stainless steel is the substrate for a magnetic-recording disk. The surface of the substrate may be hardened by plasma nitriding, plasma carburizing, or plasma carbonitriding. A hard coating may be applied to the substrate by evaporative reactive ion plating or reactive sputtering of aluminum nitride, silicon nitride, silicon carbide, or nitrides, carbides, or borides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, or tungsten.

US Patent:

54572983, Oct 10, 1995

Filed:

Jul 27, 1993

Appl. No.:

8/098417

Inventors:

Carl W. Nelson - Hayward CA
Richard D. Weir - Agoura Hills CA

Assignee:

Tulip Memory Systems, Inc. - Fremont CA

International Classification:

B23K 1000
H01L 21306

US Classification:

21912152

Abstract:

A hollow-cathode plasma device includes a hollow chamber composed of an electrically conductive material with a gas inlet at one end and a plasma outlet at an opposite end, a multipolar magnet array surrounding a portion of the chamber for isolating the plasma from the walls of the chamber, and a radiofrequency power source connected to the chamber.

US Patent:

54909104, Feb 13, 1996

Filed:

Mar 6, 1995

Appl. No.:

8/400137

Inventors:

Carl W. Nelson - Hayward CA
Richard D. Weir - Agoura Hills CA

Assignee:

Tulip Memory Systems, Inc. - Fremont CA

International Classification:

C23C 1434

US Classification:

20419215

Abstract:

A sputtering apparatus for depositing thin films on substrates is disclosed, which includes a process chamber having a central sputtering region and an annular plasma distribution region surrounding and open to the central sputtering region, a planar disk diode positioned in the central sputtering region of the process chamber, a mechanism for positioning a substrate within the central sputtering region adjacent to the planar disk diode, and a plasma generation means for supplying plasma to the annular plasma distribution region of the process chamber for diffusion into the central sputtering region.

US Patent:

58559515, Jan 5, 1999

Filed:

Apr 18, 1997

Appl. No.:

8/844447

Inventors:

Carl W. Nelson - Hayward CA
Richard D. Weir - Agoura Hills CA
Richard S. Weir - Agoura Hills CA

Assignee:

Tulip Memory Systems, Inc. - Fremont CA

International Classification:

C23C 1400

US Classification:

427129

Abstract:

An improved magnetic-recording disk and a process for manufacturing magnetic-recording disks are disclosed. An electrically conductive hard coating is deposited upon a ceramic substrate. This coating can be one from the group including the nitrides, carbides, and borides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, or tungsten. Graded interfacial diffusion or pseudo-diffusion layers are formed between the ceramic substrate and the coating by the elemental metal present in the coating. Magnetic-recording media is then deposited upon the electrically conductive coating. Optionally, a texturable coating that is softer than the hard coating can be placed over the electrically conductive hard coating before the magnetic-recording media is deposited. This texturable coating limits the depth to which abrasive tape texturing can take place.

US Patent:

59617926, Oct 5, 1999

Filed:

Apr 18, 1997

Appl. No.:

8/844162

Inventors:

Carl W. Nelson - Hayward CA
Richard D. Weir - Agoura Hills CA
Richard S. Weir - Agoura Hills CA

Assignee:

Tulip Memory Systems, Inc. - Fremont CA

International Classification:

C23C 1400
C23C 1432

US Classification:

2041921

Abstract:

An improved magnetic-recording disk and a process for manufacturing magnetic-recording disks are disclosed. Precision cold-rolled titanium or titanium alloy is the substrate for a magnetic-recording disk. The surface of the substrate may be hardened by plasma nitriding, plasma carburizing, or plasma carbonitriding. A hard coating may be applied to the substrate by evaporative reactive ion plating or reactive sputtering of aluminum nitride, silicon nitride, silicon carbide, or nitrides, carbides, or borides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, or tungsten.

US Patent:

56816359, Oct 28, 1997

Filed:

Jan 20, 1994

Appl. No.:

8/184844

Inventors:

Carl W. Nelson - Hayward CA
Richard D. Weir - Agoura Hills CA
Richard S. Weir - Agoura Hills CA

Assignee:

Tulip Memory Systems, Inc. - Fremont CA

International Classification:

G11B 566

US Classification:

428 653

Abstract:

An improved magnetic-recording disk and a process for manufacturing magnetic-recording disks are disclosed. An electrically conductive hard coating is deposited upon a ceramic substrate. This coating can be one from the group including the nitrides, carbides, and borides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, or tungsten. Graded interfacial diffusion or pseudo-diffusion layers are formed between the ceramic substrate and the coating by the elemental metal present in the coating. Magnetic-recording media is then deposited upon the electrically conductive coating. Optionally, a texturable coating that is softer than the hard coating can be placed over the electrically conductive hard coating before the magnetic-recording media is deposited. This texturable coating limits the depth to which abrasive tape texturing can take place.

US Patent:

57077053, Jan 13, 1998

Filed:

Sep 8, 1993

Appl. No.:

8/118147

Inventors:

Carl W. Nelson - Hayward CA
Richard D. Weir - Agoura Hills CA
Richard S. Weir - Agoura Hills CA

Assignee:

Tulip Memory Systems, Inc. - Fremont CA

International Classification:

G11B 566

US Classification:

428 653

Abstract:

An improved magnetic-recording disk and a process for manufacturing magnetic-recording disks are disclosed. Precision cold-rolled titanium or titanium alloy is the substrate for a magnetic-recording disk. The surface of the substrate may be hardened by plasma nitriding, plasma carburizing, or plasma carbonitriding. A hard coating may be applied to the substrate by evaporative reactive ion plating or reactive sputtering of aluminum nitride, silicon nitride, silicon carbide, or nitrides, carbides, or borides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, or tungsten.

US Patent:

52325695, Aug 3, 1993

Filed:

Mar 9, 1992

Appl. No.:

7/848251

Inventors:

Carl W. Nelson - Hayward CA
Richard D. Weir - Agoura Hills CA

Assignee:

Tulip Memory Systems, Inc. - Fremont CA

International Classification:

C23C 1434

US Classification:

20419215

Abstract:

Disclosed is a sputtering apparatus and method for deposition of a film on a substrate with means for exciting a plasma by ultrahigh radio frequency or microwave at the electron cyclotron resonance to create a region of plasma which is devoid of magnetic field and at least one high-radio frequency planar disk diode positioned within the region devoid of magnetic field, a target attached to said rf planar diode, and a high-radio frequency substrate biasing electrode parallel to the planar diode.