Charles B Payne

US Patent:

41693370, Oct 2, 1979

Filed:

Mar 30, 1978

Appl. No.:

5/891665

Inventors:

Charles C. Payne - Chicago IL

Assignee:

Nalco Chemical Company - Oak Brook IL

International Classification:

B24B 100

US Classification:

51283R

Abstract:

Semi-conductors can be polished with greater efficiency by using as a polishing agent a blend of colloidal silica or silica gel and a water-soluble amine.

US Patent:

39818209, Sep 21, 1976

Filed:

Jun 16, 1975

Appl. No.:

5/587320

Inventors:

Richard C. Miller - Chicago IL
Charles C. Payne - Chicago IL

Assignee:

Nalco Chemical Company - Oak Brook IL

International Classification:

C09K 1100
C09K 314

US Classification:

25230116

Abstract:

A large particle sized silica sol and a fluorescent dye are mixed together and applied as a coating to a substrate with the application monitored during coating by a light which renders the fluorescent dye visible; if the coating is blotched or uneven, corrections can be made during the run to provide a uniform coating.

US Patent:

43045758, Dec 8, 1981

Filed:

Mar 20, 1980

Appl. No.:

6/132075

Inventors:

Charles C. Payne - Chicago IL

Assignee:

Nalco Chemical Company - Oak Brook IL

International Classification:

B01J 1300
C01B 33141

US Classification:

51308

Abstract:

Large particle aqueous silica sols are prepared in a single step by heating an alkaline aqueous slica sol containing smaller silica particles mixed with larger silica particles while maintaining the ratio of the total surface area of the smaller silica particles to the total surface area of the larger silica particles at a predetermined ratio and under conditions such that the smaller silica particles dissolve and redeposit on the larger silica particles thereby producing an aqueous silica sol in which the majority of the silica particles have a size significantly larger than the larger silica particles in the starting mixed sol.

US Patent:

59197072, Jul 6, 1999

Filed:

Jun 27, 1997

Appl. No.:

8/884605

Inventors:

Rodney H. Banks - Naperville IL
Charles C. Payne - Aurora IL

Assignee:

Nalco Chemical Company - Naperville IL

International Classification:

G01N 2127

US Classification:

436 60

Abstract:

The concentration of the active ingredient in a rolling oil emulsion can be rapidly determined, and correction of the concentration of the active ingredient can be undertaken by measuring the measuring the amount of light reflected from the emulsion at the peak absorbing wavelength of the dye to obtain a first reflectance value and measuring the amount of light reflected from said emulsion at a wavelength other than the peak absorbing wavelength of the dye to obtain a second reflectance value for at least two different concentrations of the rolling oil in the rolling oil emulsion, establishing a calibration curve, and then monitoring the rolling oil emulsion in like manner. The results may be utilized to feed additional additive to the emulsion, or may be used to feed water into the emulsion system.

US Patent:

42150310, Jul 29, 1980

Filed:

Feb 14, 1979

Appl. No.:

6/011838

Inventors:

Charles C. Payne - Chicago IL

Assignee:

Nalco Chemical Company - Oak Brook IL

International Classification:

C08K 904

US Classification:

260 40R

Abstract:

An unsaturated polyester resin which contains at least 0. 3% by weight of silica particles having an ultimate particle size within the range of 4-70 millimicrons, whose particles have their surface coated with a quaternary ammonium salt which contains at least 1 organic radical of at least 6 carbon atoms in chain length.

US Patent:

52308332, Jul 27, 1993

Filed:

Aug 19, 1992

Appl. No.:

7/932284

Inventors:

John A. Romberger - Oak Park IL
Charles C. Payne - Aurora IL

Assignee:

Nalco Chemical Company - Naperville IL

International Classification:

B24B 100
C09G 102

US Classification:

2523635

Abstract:

A colloidal silica slurry comprising: a low metals ammonium-stabilized silica sol having the following characteristics: SiO. sub. 2 present in the range between about 15 to about 50 weight percent; a pH in the range between about 8. 5 to about 11. 3; a particle diameter in the range between about 4. 0 to about 130 nm; aluminum, as Al, present in an amount less than about 100 ppm, based on SiO. sub. 2 ; iron, as Fe, present in an amount less than about 50 ppm, based on SiO. sub. 2 ; potassium, as K, present in an amount less than about 25 ppm, based on SiO. sub. 2 ; and sodium, as Na, present in an amount less than about 500 ppm, based on SiO. sub. 2 ; and a bactericide, a polishing rate accelerator which differs from the bactericide, and/or a sodium chlorite or sodium hypochlorite biocide. Optionally, a fungicide may also be added to the colloidal silica slurry to inhibit fungi growth.

US Patent:

44513887, May 29, 1984

Filed:

Nov 2, 1981

Appl. No.:

6/317041

Inventors:

Charles C. Payne - Chicago IL

Assignee:

Nalco Chemical Company - Oak Brook IL

International Classification:

B01J 1300

US Classification:

252313S

Abstract:

New alumina coated silica sols are produced by a method which comprises mixing a concentrated deionized silica sol with concentrated solutions of trivalent acid aluminum salts, heating this premix to at least 90. degree. C. for 1-15 minutes to form an alumina reacted silica sol solution, cooling this reacted silica sol solution to form a cooled alumina reacted silica sol solution, diluting with deionized water to about 10 weight percent solids, exposing this diluted alumina reacted silica sol to ultrafiltration through a membrane having a molecular weight cutoff of about 30,000, adding distilled or deionized water to the diluted alumina reacted silica sol during ultrafiltration to wash dissolved salts from this salt solution forming a diluted alumina-coated silica sol having a pH between about 4-5 and a conductivity between about 2,000-4,000 micromhos, concentrating this dilute alumina-coated silica sol to at least 30 weight percent solids, thereby obtaining a stable alumina-coated silica sol.

US Patent:

43561071, Oct 26, 1982

Filed:

Jul 18, 1980

Appl. No.:

6/170030

Inventors:

Charles C. Payne - Chicago IL

Assignee:

Nalco Chemical Company - Oak Brook IL

International Classification:

B01J 1300
C01B 3314

US Classification:

252313S

Abstract:

New and useful silica sols especially suitable for polishing semiconductor wafers are prepared by a special process involving heating a broad distribution aqueous silica sol containing larger silica particles of which at least 50% in number have a particle size of at least 40 millimicrons, the remainder of the silica particles being smaller and of different sizes, whereby the resultant silica sol contains a number of the larger silica particles having a particle size of at least 40 millimicrons which is at least as great as the starting sol, the weight average of said larger silica particles is greater than that of the larger silica particles in the starting sol, the number of smaller particles is less than the number of smaller particles in the starting sol, and the resultant sol contains fewer particles of different sizes than the starting sol.