A spot-implant method for MOS transistors. An asymmetric masking film ( ) is formed on a semiconductor substrate and on a transistor gate ( ) with an opening ( ) adjacent to the transistor gate ( ). A spot region ( ) is formed adjacent to the transistor gate ( ) by ion implantation ( ).
A memory device in which each cell includes two portions of isolated-granular material: one portion forms the channel of a single-electron transistor, and the other provides a hysteretic I-V relationship in the gate circuit of the transistor.
Christoph A. Wasshuber - Parker TX Zhihao Chen - Plano TX Freidoon Mehrad - Plano TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01L 2176
US Classification:
438424
Abstract:
Methods are disclosed for the formation of isolation structures and trenches in semiconductor devices, in which lower corners of an isolation trench are rounded after trench formation using an oxidation process which oxidizes substrate material from the trench sidewalls and bottom faster than from the lower corners of the trench. The oxide formed during the rounding process is then removed prior to performing other etch processes, to expose substrate material having rounded lower corners. Thereafter, a liner is formed and the trench is filled with dielectric material to complete the isolation structure.
Christoph Wasshuber - Parker TX Keith A. Joyner - Richardson TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01L 2100
US Classification:
438301, 438528
Abstract:
Methods and apparatus are disclosed for selectively inducing stress in a semiconductor device, wherein a first region of a substrate is implanted so as to induce stress in a second region. An electrical device is formed at least partially in the second region, wherein the induced stress therein may improve one or more operational characteristics of the device, such as channel region carrier mobility.
The present invention provides a single-electron transistor device (). The device () comprises a source () and drain () located over a substrate () and a quantum island () situated between the source and drain (), to form tunnel junctions () between the source and drain (). The device () further includes a movable electrode () located adjacent the quantum island () and a displaceable dielectric () located between the moveable electrode () and the quantum island (). The present invention also includes a method of fabricating a single-electron device (), and a transistor circuit () that include a single-electron device ().
The present invention provides a single-electron transistor device (). The device () comprises a source () and drain () located over a substrate () and a quantum island () situated between the source and drain (), to form tunnel junctions () between the source and drain (). The device () further includes a movable electrode () located adjacent the quantum island () and a displaceable dielectric () located between the moveable electrode () and the quantum island (). The present invention also includes a method of fabricating a single-electron device (), and a transistor circuit () that include a single-electron device ().
Method To Improve Drive Current By Increasing The Effective Area Of An Electrode
Majid M. Mansoori - Plano TX, US Christoph Wasshuber - Cambridge MA, US
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01L 29/76 H01L 29/94
US Classification:
257384, 257754
Abstract:
The present invention provides source/drain electrode for a transistor. The source/drain electrode comprises a plurality of polysilicon grains located over a source/drain region. A metal salicide layer conformally coats the plurality of polysilicon grains. The present invention also includes a method of fabricating the above described source/drain electrode , and integrated circuit have includes a semiconductor device having the described source/drain electrodes.
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