Christopher J Coyle

US Patent:

8012403, Sep 6, 2011

Filed:

Sep 14, 2001

Appl. No.:

10/489924

Inventors:

Jerome C. Birnbaum - Richland WA, US
Glen E. Fryxell - Kennewick WA, US
Shari Li Xiaohong - Richland WA, US
Christopher A. Coyle - Pasco WA, US
Glen C. Dunham - Kennewick WA, US
Suresh Baskaran - Kennewick WA, US
Ralph E. Williford - Kennewick WA, US

Assignee:

Battelle Memorial Institute - Richland WA

International Classification:

B28B 1/30

US Classification:

264656, 264 44, 264628, 264675

Abstract:

Porous ceramic and hybrid ceramic films are useful as low dielectric constant interlayers in semiconductor interconnects. (Hybrid ceramic films are defined as films that contain organic and ceramic molecular components in the structure, as, for example, organosilicates). This invention describes the usefulness of humidity treatments (using specific temperature/humidity treatments as illustrative examples) in increasing mechanical integrity of porous dielectric films with minimal detrimental effect on film porosity or dielectric constant and with no adverse impact on film quality. The efficacy of such treatments is illustrated using surfactant-templated mesoporous silicate films as an example. This invention also describes a specific family of additives to be used with highly pure alkali-metal-free ceramic and hybrid precursors for such dielectric films that will enable better control of the film porosity and quality and lower dielectric constants with the required mechanical integrity. The efficacy of such additives is illustrated using surfactant-templated mesoporous silicate films as a model example.

US Patent:

20020034626, Mar 21, 2002

Filed:

Apr 18, 2001

Appl. No.:

09/837885

Inventors:

Jun Liu - West Richland WA, US
Karel Domansky - Cambridge MA, US
Xiaohong Li - Richland WA, US
Glen Fryxell - Kennewick WA, US
Suresh Baskaran - Kennewick WA, US
Nathan Kohler - Richland WA, US
Suntharampillai Thevuthasan - Kennewick WA, US
Christopher Coyle - Richland WA, US
Jerome Birnbaum - Richland WA, US

International Classification:

B32B003/26

US Classification:

428/312600, 427/240000, 427/385500, 428/313500

Abstract:

The present invention is a mesoporous silica film having a low dielectric constant and method of making having the steps of combining a surfactant in a silica precursor solution, spin-coating a film from this solution mixture, forming a partially hydroxylated mesoporous film, and dehydroxylating the hydroxylated film to obtain the mesoporous film. It is advantageous that the small polyoxyethylene ether surfactants used in spin-coated films as described in the present invention will result in fine pores smaller on average than about 20 nm. The resulting mesoporous film has a dielectric constant less than 3, which is stable in moist air with a specific humidity. The present invention provides a method for superior control of film thickness and thickness uniformity over a coated wafer, and films with low dielectric constant.

US Patent:

20060060633, Mar 23, 2006

Filed:

Sep 22, 2004

Appl. No.:

10/948346

Inventors:

K. Weil - Richland WA, US
Lawrence Chick - West Richland WA, US
Christopher Coyle - Pasco WA, US
John Hardy - Richland WA, US
Guanguang Xia - Pasco WA, US
Kerry Meinhardt - Kennewick WA, US
Vincent Sprenkle - Richland WA, US
Dean Paxton - Kennewick WA, US

Assignee:

Battelle Memorial Institute - Richland WA

International Classification:

H01M 2/02

US Classification:

228101000, 429034000

Abstract:

A seal formed between a metal part and a second part that will remain gas tight in high temperature operating environments which experience frequent thermal cycling, which is particularly useful as an insulating joint in solid oxide fuel cells. A first metal part is attached to an reinforcing material. A glass forming material in the positioned in between the first metal part and the second part, and a seal is formed between the first metal part and the second part by heating the glass to a temperature suitable to melt the glass forming materials. The glass encapsulates and bonds at least a portion of the reinforcing material, thereby adding tremendous strength to the overall seal. A ceramic material may be added to the glass forming materials, to assist in forming an insulating barrier between the first metal part and the second part and to regulating the viscosity of the glass during the heating step.

US Patent:

20060063057, Mar 23, 2006

Filed:

Sep 22, 2004

Appl. No.:

10/948359

Inventors:

K. Weil - Richland WA, US
Lawrence Chick - West Richland WA, US
Christopher Coyle - Pasco WA, US
John Hardy - Richland WA, US
Guanguang Xia - Pasco WA, US
Kerry Meinhardt - Kennewick WA, US
Vincent Sprenkle - Richland WA, US
Dean Paxton - Kennewick WA, US

Assignee:

Battelle Memorial Institute - Richland WA

International Classification:

H01M 2/02

US Classification:

429034000, 228101000

Abstract:

A seal formed between a metal part and a second part that will remain gas tight in high temperature operating environments which experience frequent thermal cycling, which is particularly useful as an insulating joint in solid oxide fuel cells. A first metal part is attached to a reinforcing material. A glass forming material in the positioned in between the first metal part and the second part, and a seal is formed between the first metal part and the second part by heating the glass to a temperature suitable to melt the glass forming materials. The glass encapsulates and bonds at least a portion of the reinforcing material, thereby adding tremendous strength to the overall seal. A ceramic material may be added to the glass forming materials, to assist in forming an insulating barrier between the first metal part and the second part and to regulating the viscosity of the glass during the heating step.

US Patent:

20090130458, May 21, 2009

Filed:

Jan 26, 2009

Appl. No.:

12/359530

Inventors:

K. Scott Weil - Richland WA, US
Lawrence A. Chick - West Richland WA, US
Christopher A. Coyle - Pasco WA, US
John S. Hardy - Richland WA, US
Guanguang Xia - Pasco WA, US
Kerry D. Meinhardt - Kennewick WA, US
Vincent L. Sprenkle - Richland WA, US
Dean M. Paxton - Kennewick WA, US

International Classification:

B32B 15/04
C03C 27/02

US Classification:

428433, 65 591, 428332

Abstract:

A seal formed between a metal part and a second part that will remain gas tight in high temperature operating environments which experience frequent thermal cycling, which is particularly useful as an insulating joint in solid oxide fuel cells. A first metal part is attached to a reinforcing material. A glass forming material in the positioned in between the first metal part and the second part, and a seal is formed between the first metal part and the second part by heating the glass to a temperature suitable to melt the glass forming materials. The glass encapsulates and bonds at least a portion of the reinforcing material, thereby adding tremendous strength to the overall seal. A ceramic material may be added to the glass forming materials, to assist in forming an insulating barrier between the first metal part and the second part and to regulating the viscosity of the glass during the heating step.

US Patent:

20130196224, Aug 1, 2013

Filed:

Jan 29, 2013

Appl. No.:

13/752936

Inventors:

Guosheng Li - Richland WA, US
Xiaochuan Lu - Richland WA, US
Vincent L. Sprenkle - Richland WA, US
John P. Lemmon - Kennewick WA, US
Zhenguo Yang - Bellevue WA, US
Christopher A. Coyle - Pasco WA, US

Assignee:

BATTELLE MEMORIAL INSTITUTE - Richland WA

International Classification:

H01M 10/0563

US Classification:

429199

Abstract:

Sodium metal-halide energy storage devices utilizing a substituting salt in its secondary electrolyte can operate at temperatures lower than conventional ZEBRA batteries while maintaining desirable performance and lifetime characteristics. According to one example, a sodium metal-halide energy storage device operates at a temperature less than or equal to 200 C. and has a liquid secondary electrolyte having MNaAlClH, wherein M is a metal cation of a substituting salt, H is an anion of the substituting salt, y is a mole fraction of substituted Na and Cl, and x is a ratio of y over r, where r is the oxidation state of M. The melting temperature of the substituting salt is less than that of NaCl.

US Patent:

63290170, Dec 11, 2001

Filed:

Oct 4, 1999

Appl. No.:

9/413062

Inventors:

Jun Liu - West Richland WA
Karel Domansky - Cambridge MA
Xiaohong Li - Richland WA
Glen E. Fryxell - Kennewick WA
Suresh Baskaran - Kennewick WA
Nathan J. Kohler - Richland WA
Suntharampillai Thevuthasan - Kennewick WA
Christopher A. Coyle - Richland WA
Jerome C. Birnbaum - Richland WA

Assignee:

Battelle Memorial Institute - Richland WA

International Classification:

B05D 312

US Classification:

427240

Abstract:

The present invention is a mesoporous silica film having a low dielectric constant and method of making having the steps of combining a surfactant in a silica precursor solution, spin-coating a film from this solution mixture, forming a partially hydroxylated mesoporous film, and dehydroxylating the hydroxylated film to obtain the mesoporous film. It is advantageous that the small polyoxyethylene ether surfactants used in spin-coated films as described in the present invention will result in fine pores smaller on average than about 20 nm. The resulting mesoporous film has a dielectric constant less than 3, which is stable in moist air with a specific humidity. The present invention provides a method for superior control of film thickness and thickness uniformity over a coated wafer, and films with low dielectric constant.