Christopher D Kiley

US Patent:

8125652, Feb 28, 2012

Filed:

Dec 23, 2010

Appl. No.:

12/977514

Inventors:

Paul E. Fogel - Somerville MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T. Buzan - Dunstable MA, US
Christopher C. Kiley - Carlisle MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

G01B 11/14

US Classification:

356614, 25055907, 250234, 3562371, 356399

Abstract:

A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.

US Patent:

59082810, Jun 1, 1999

Filed:

Sep 20, 1996

Appl. No.:

8/716943

Inventors:

Christopher Kiley - Lincoln MA

Assignee:

Brooks Automation Inc. - Chelmsford MA

International Classification:

B25J 1800

US Classification:

4147445

Abstract:

An transfer device for moving substrates from one position to another comprises a base and a drive arm pivotally connected to one another about a first pivot axis. A drive is connected to the drive arm for moving the drive arm through an arc about the first pivot axis. The drive arm has a free end which has a second pivot axis disposed parallel to the first pivot axis. The drive arm free end further including at least one article handling element which is rotatably disposed about the second pivot axis. A belt rotatably couples the at least one article handling element to the base such that upon movement of the drive arm through the arc in a first rotary direction the at least one article handling element is rotated in the other opposite direction to move a substrate along a straight line path.