Christopher M Kiley

US Patent:

8125652, Feb 28, 2012

Filed:

Dec 23, 2010

Appl. No.:

12/977514

Inventors:

Paul E. Fogel - Somerville MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T. Buzan - Dunstable MA, US
Christopher C. Kiley - Carlisle MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

G01B 11/14

US Classification:

356614, 25055907, 250234, 3562371, 356399

Abstract:

A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.

US Patent:

8253948, Aug 28, 2012

Filed:

Feb 27, 2012

Appl. No.:

13/406252

Inventors:

Christopher C. Kiley - Carlisle MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T. Buzan - Dunstable MA, US
Paul E. Fogel - Somerville MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

G01B 11/14

US Classification:

356614, 25055907, 250234, 3562371, 356399

Abstract:

A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.

US Patent:

8270702, Sep 18, 2012

Filed:

Sep 3, 2010

Appl. No.:

12/875462

Inventors:

Christopher C Kiley - Carlisle MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T Buzan - Dunstable MA, US
Paul E. Fogel - Somerville MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

G06K 9/00
G06K 9/40

US Classification:

382141, 382260

Abstract:

A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.

US Patent:

8634633, Jan 21, 2014

Filed:

Sep 14, 2012

Appl. No.:

13/617333

Inventors:

Christopher C Kiley - Carlisle MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T Buzan - Dunstable MA, US
Paul E. Fogel - Somerville MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

G06K 9/00

US Classification:

382141

Abstract:

A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.

US Patent:

20070285673, Dec 13, 2007

Filed:

Mar 5, 2007

Appl. No.:

11/682306

Inventors:

Christopher Kiley - Carlisle MA, US
Peter van der Meulen - Newburyport MA, US
Forest Buzan - Dunstable MA, US
Paul Fogel - Somerville MA, US

International Classification:

G01B 11/14

US Classification:

356614000, 901047000

Abstract:

A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.

US Patent:

20080145194, Jun 19, 2008

Filed:

Feb 15, 2008

Appl. No.:

12/032405

Inventors:

Christopher C. Kiley - Carlisle MA, US
Forrest T. Buzan - Dunstable MA, US

International Classification:

H01L 21/67

US Classification:

41422202

Abstract:

A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.

US Patent:

20080232933, Sep 25, 2008

Filed:

Feb 14, 2008

Appl. No.:

12/030897

Inventors:

Christopher C. Kiley - Carlisle MA, US

International Classification:

H01L 21/67

US Classification:

414217, 901 30

Abstract:

Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

US Patent:

59082810, Jun 1, 1999

Filed:

Sep 20, 1996

Appl. No.:

8/716943

Inventors:

Christopher Kiley - Lincoln MA

Assignee:

Brooks Automation Inc. - Chelmsford MA

International Classification:

B25J 1800

US Classification:

4147445

Abstract:

An transfer device for moving substrates from one position to another comprises a base and a drive arm pivotally connected to one another about a first pivot axis. A drive is connected to the drive arm for moving the drive arm through an arc about the first pivot axis. The drive arm has a free end which has a second pivot axis disposed parallel to the first pivot axis. The drive arm free end further including at least one article handling element which is rotatably disposed about the second pivot axis. A belt rotatably couples the at least one article handling element to the base such that upon movement of the drive arm through the arc in a first rotary direction the at least one article handling element is rotated in the other opposite direction to move a substrate along a straight line path.