Christopher Paul Pate

US Patent:

20110253349, Oct 20, 2011

Filed:

Oct 8, 2010

Appl. No.:

12/900762

Inventors:

Alexander I. Ershov - Escondido CA, US
Robert L. Morse - Vista CA, US
William N. Partlo - Poway CA, US
Christopher P. Pate - San Diego CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

F28F 13/12

US Classification:

1651091, 137561 R, 137 1

Abstract:

Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.

US Patent:

20130321926, Dec 5, 2013

Filed:

Jun 27, 2012

Appl. No.:

13/535148

Inventors:

Robert A. Bergstedt - Carlsbad CA, US
Christopher Paul Pate - San Diego CA, US
Jason Michael Arcand - San Diego CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

G02B 27/14

US Classification:

359634

Abstract:

A dichroic beam splitter module is disclosed for separating a main pulse laser beam from a pre-pulse laser beam each traversing a common beam path. In one embodiment, two dichroic elements are physically aligned along the beam path and are configured to pass the pre-pulse, a laser light having a first wavelength, to target material located near an irradiation site yet reflect the main pulse, a laser light having a second wavelength. The reflected main pulse is then further reflected by two reflective elements or mirrors from the first dichroic element to the second dichroic element and then on to the irradiation site. In alternative embodiments, the first mirror is deformable to alter beam characteristics of the reflected main pulse beam and the second mirror is adjustable to align the main pulse beam to the irradiation site.