Christopher R Wargo

US Patent:

7021667, Apr 4, 2006

Filed:

May 16, 2003

Appl. No.:

10/440458

Inventors:

Jeffrey M. Campbell - Foxboro MA, US
J. Karl Niermeyer - Tyngsboro MA, US
Gastón de los Reyes - Boston MA, US
Christopher R. Wargo - Wellesley MA, US
Richard L. Miller - Needham MA, US
Stephen K. Guerrera - Holliston MA, US

Assignee:

Mykrolis Corporation - Billerica MA

International Classification:

F16L 39/00

US Classification:

285 26, 2851241, 2851243

Abstract:

A connector apparatus is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.

US Patent:

7037424, May 2, 2006

Filed:

Jan 28, 2005

Appl. No.:

11/045726

Inventors:

J. Karl Niermeyer - Tyngsboro MA, US
Gastón de los Reyes - Boston MA, US
Christopher R. Wargo - Wellesley MA, US
Richard L. Miller - Needham MA, US
Stephen K. Guerrera - Holliston MA, US

Assignee:

Mykrolis Corporation - Billerica MA

International Classification:

B01D 63/00

US Classification:

2103216, 210450, 210456, 2104331, 2103218, 210447, 285 26, 2851241

Abstract:

A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.

US Patent:

7292945, Nov 6, 2007

Filed:

Jul 18, 2003

Appl. No.:

10/521697

Inventors:

Christopher Wargo - Wellesley MA, US
J. Karl Niermeyer - Tyngsboro MA, US
Craig L. Brodeur - Marlborough MA, US
William Basser - North Adams MA, US

Assignee:

Entegris, Inc. - Chaska MN

International Classification:

G06F 19/00

US Classification:

702 50, 73 125

Abstract:

The present invention provides restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration.

US Patent:

7447600, Nov 4, 2008

Filed:

Aug 31, 2007

Appl. No.:

11/897740

Inventors:

Christopher Wargo - Wellesley MA, US
J. Karl Niermeyer - Tyngsboro MA, US
Craig L. Brodeur - Marlborough MA, US
William Basser - North Adams MA, US

Assignee:

Entegris, Inc. - Chaska MN

International Classification:

G06F 19/00

US Classification:

702 50

Abstract:

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a valve can be adjusted by application of fuzzy logic which involves quantizing input variables into the degree to which a small set of logical values is true. In one embodiment, variables related to flow rate and change in flow rate over time can be compared to membership functions to generate fuzzy inputs, based upon which fuzzy outputs can be generated.

US Patent:

7885773, Feb 8, 2011

Filed:

Oct 17, 2008

Appl. No.:

12/253732

Inventors:

Christopher Wargo - Wellesley MA, US
J. Karl Niermeyer - Tyngsboro MA, US
Craig L. Brodeur - Malborough MA, US
William Basser - North Adams MA, US

Assignee:

Entegris, Inc. - Billerica MA

International Classification:

G06F 19/00

US Classification:

702 50, 73 116

Abstract:

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.

US Patent:

8092730, Jan 10, 2012

Filed:

Nov 21, 2006

Appl. No.:

12/095775

Inventors:

Christopher Wargo - Wellesley MA, US
Thomas LeBlanc - Mendon MA, US

Assignee:

Entegris, Inc. - Billerica MA

International Classification:

B29C 45/17
C08J 9/06

US Classification:

264 54, 264239, 15102

Abstract:

A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded from a two piece mold and the openings can have draft angles to facilitate the molding process.

US Patent:

8155896, Apr 10, 2012

Filed:

Jan 28, 2011

Appl. No.:

13/016255

Inventors:

Christopher Wargo - Wellesley MA, US
J. Karl Niermeyer - Tyngsboro MA, US
Craig L. Brodeur - Marlborough MA, US
William Basser - North Adams MA, US

Assignee:

Entegris, Inc. - Billerica MA

International Classification:

G06F 19/00

US Classification:

702 50, 73 116

Abstract:

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.

US Patent:

D682497, May 14, 2013

Filed:

Dec 21, 2010

Appl. No.:

29/381652

Inventors:

Christopher Wargo - Wellesley MA, US
Rakesh Kumar Singh - Acton MA, US
David Trio - Dracut MA, US
Eric McNamara - Nashua NH, US

Assignee:

Entegris, Inc. - Billerica MA

International Classification:

1505

US Classification:

D32 25, D4123, D15138