Clifford M Fowler

US Patent:

57962561, Aug 18, 1998

Filed:

Apr 24, 1996

Appl. No.:

8/634600

Inventors:

Clifford M. Fowler - Phoenix AZ
William V. Duncan - Scottsdale AZ

Assignee:

Motorola, Inc. - Schaumburg IL

International Classification:

G01N 2760
G01R 3126

US Classification:

324456

Abstract:

An ESD sensor includes a plurality of layers of dielectric material positioned on a substrate, each having a different thickness, a first contact positioned adjacent each of the plurality of layers and a plurality of second contacts, one each positioned on each layer of the plurality of layers of dielectric material. Each different thickness of each individual layer of dielectric material is formed to provide a specific voltage at which an electrical short will occur between the first and second contacts when an ESD appears thereacross, so that the sensor provides an indication of a range of voltages.