Corey K O'Connor

US Patent:

20140065836, Mar 6, 2014

Filed:

Aug 28, 2012

Appl. No.:

13/597244

Inventors:

Michael P. TOBEN - Smithtown NY, US
Robert K. Barr - Shrewsbury MA, US
Corey O'Connor - Worcester MA, US

Assignee:

Rohm and Haas Electronic Materials LLC - Marlborough MA

International Classification:

C09K 13/00
H01L 21/3063

US Classification:

438745, 252 791, 257E21216

Abstract:

Monocrystalline semiconductor substrates are textured with alkaline solutions to form pyramid structures on their surfaces to reduce incident light reflectance and improve light absorption of the wafers. The alkaline baths include hydantoin compounds and derivatives thereof in combination with alkoxylated glycols to inhibit the formation of flat areas between pyramid structures to improve the light absorption.