Daniel P Herr

US Patent:

6509138, Jan 21, 2003

Filed:

Jan 12, 2000

Appl. No.:

09/482193

Inventors:

Karen K. Gleason - Lexington MA
Christopher Ober - Ithaca NY
Daniel Herr - Chapel Hill NC

Assignee:

Semiconductor Research Corporation - Research Park NC
Cornell Research Foundation, Inc. - Ithaca NY
Massachusetts Institute of Technology - Cambidge MA

International Classification:

G03F 726

US Classification:

430313, 430311, 430331, 216 62

Abstract:

Processes for patterning radiation sensitive layers are disclosed. In one embodiment, the process includes depositing a radiation sensitive material on a substrate by chemical vapor deposition. The radiation sensitive material is exposed to radiation to form a pattern and the pattern is developed using a supercritical fluid (SCF).

US Patent:

6946736, Sep 20, 2005

Filed:

Oct 23, 2002

Appl. No.:

10/279304

Inventors:

Karen K. Gleason - Lexington MA, US
Christopher Ober - Ithaca NY, US
Daniel Herr - Chapel Hill NC, US

Assignee:

Semiconductor Research Corporation - Research Park NC
Cornell Research Foundation, Inc. - Ithaca NY
Massachusetts Institute of Technology - Cambridge MA

International Classification:

H01L023/12

US Classification:

257758, 257750, 257759

Abstract:

Provided is a process for lithographically patterning a material on a substrate comprising the steps of (a) depositing a radiation sensitive material on the substrate by chemical vapor deposition; (b) selectively exposing the radiation sensitive material to radiation to form a pattern; and (c) developing the pattern using a supercritical fluid (SCF) as a developer. Also disclosed is a microstructure formed by the foregoing process. Also disclosed is a process for lithographically patterning a material on a substrate wherein after steps (a) and (b) above, the pattern is developed using a dry plasma etch. Also disclosed is a microstructure comprising a substrate; and a patterned dielectric layer, wherein the patterned dielectric layer comprises at least one two-dimensional feature having a dimensional tolerance more precise than 7%. Also disclosed is a microelectronic structure comprising a substrate; a plurality of transistors formed on the substrate; and a plurality of conductive features formed within a dielectric pattern, wherein the plurality of conductive features include at least one two-dimensional feature having a dimensional tolerance more precise than 7%.

US Patent:

8429052, Apr 23, 2013

Filed:

Jul 18, 2006

Appl. No.:

11/488317

Inventors:

Daniel P. Herr - South Windsor CT, US
Robert J. Toth - Fort Wayne IN, US

Assignee:

Lincoln National Life Insurance Company - Fort Wayne IN

International Classification:

G06Q 40/00

US Classification:

705 36R, 705 35, 705 36 T

Abstract:

A computer-implemented method of administering income distributions from an employer-sponsored retirement plan having a participant account value provides an option to a plan participant to elect a lifetime payout funded by at least a portion of the participant's account value. The lifetime payout may be funded by a Plan Distributed Annuity (“PDA”) or through the plan. An access period may be provided in the latter case, during which a participant maintains access to, and control over, the account.

US Patent:

20100191548, Jul 29, 2010

Filed:

Jan 27, 2010

Appl. No.:

12/694585

Inventors:

Daniel P. Herr - South Windsor CT, US
Mark S. Doherty - Southington CT, US
Kimberly A. Genovese - East Windsor CT, US

International Classification:

G06Q 40/00

US Classification:

705 4, 705 37, 705 36 R, 705 35

Abstract:

A computerized method for administering an investment account having an income or withdrawal guarantee and long term care guarantee includes the steps of establishing an investment account having an account balance, allocating a first portion of the account balance to fund a periodic long term care benefit having a long term care benefit guarantee, allocating a second portion of the account to fund a periodic income or withdrawal benefit having an income or withdrawal benefit guarantee, determining an amount of a periodic long term care benefit available for payment of a long term care benefit claims under the long term care benefit guarantee, and determining an amount of a periodic income or withdrawal benefit available for distribution under the income or withdrawal benefit guarantee. The long term care benefit guarantee may include an acceleration of benefits guarantee and an extension of benefits guarantee. A computer system which includes a processor and a program for causing the processor to perform certain steps is also disclosed.