John D. Spano - Thousand Oaks CA Danny R. Barnett - Glendale AZ
International Classification:
G01R 3122
US Classification:
324158F
Abstract:
Test probe alignment apparatus for the alignment of test probes for testing integrated circuits includes three separate stages in which the theta stage is separate from the X-Y stage and the Z stage is separate from both the theta stage and the X-Y stage.