David Phuoc Do

US Patent:

8383861, Feb 26, 2013

Filed:

Oct 6, 2009

Appl. No.:

12/587358

Inventors:

David Do - Brentwood CA, US
Christopher H. Domke - Rosharon TX, US
Jacinto Lopez-Toledo - Lake Jackson TX, US
David M. Petraitis - Covington LA, US
Thomas Z. Srnak - Arlington Heights IL, US

Assignee:

Dow Global Technologies LLC - Midland MI

International Classification:

C07C 209/00

US Classification:

564478, 564497

Abstract:

The present invention relates to processes for the manufacture of one or more ethanolamines and one or more ethyleneamines starting from the reaction of ethylene oxide with ammonia to produce one or more ethanolamines and the conversion of the ethanolamine(s) to ethyleneamine(s). The present invention also relates to separating alkylethyleneamines from ethyleneamines.

US Patent:

20120216833, Aug 30, 2012

Filed:

Feb 24, 2011

Appl. No.:

13/034386

Inventors:

Jiansheng Wang - Union City CA, US
Barbara Stanczyk - Morgan Hill CA, US
Wendell Boyd, JR. - Morgan Hill CA, US
Kevin A. Papke - , US
Joseph F. Sommers - San Jose CA, US
David Do - Milpitas CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

B08B 3/00

US Classification:

134 10, 134109

Abstract:

Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.

US Patent:

20130167885, Jul 4, 2013

Filed:

Jan 24, 2013

Appl. No.:

13/748709

Inventors:

Jiansheng Wang - Union City CA, US
David Do - Milpitas CA, US
Satyanarayana Adamala - Fremont CA, US
Ronald Trahan - Beverton OR, US

Assignee:

QUANTUM GLOBAL TECHNOLOGIES, LLC - Dublin PA

International Classification:

B08B 3/04

US Classification:

134 56 R, 134115 R, 1341042, 134 941

Abstract:

Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.