David Lester Dunlap

US Patent:

6618425, Sep 9, 2003

Filed:

Nov 17, 1999

Appl. No.:

09/442140

Inventors:

Jason R. Carlesi - San Diego CA
David J. Dunlap - San Diego CA
Igor V. Fomenkov - San Diego CA

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 300

US Classification:

372109, 700166, 700168, 700180

Abstract:

A laser controller interconnected with an electric discharge laser communicates with a remote computer incorporating a display screen programmably emulating a conventional keyboard. The display screen has a plurality of imaged virtual keys each programmably emulating a physical key of a conventional keyboard. Some virtual keys programmably emulate a prescribed sequence of keystrokes, which control, monitor, and record the laser operation. A prescribed sequence can optionally be automated, conditional, or interrupted by operator prompts. The remote computer communicates serially with the laser controller through an electrically conductive cable, a fiberoptic link, or a wireless channel. A keystroke is typically applied by manually pressing the position of a corresponding virtual key on a touch sensitive screen, or alternatively by actuating a conventional pointing device. The electric discharge laser can be a KrF or ArF excimer laser, or a F molecular laser, which can be applied as a radiation exposure source for microlithography.