David L Dutton

US Patent:

7733922, Jun 8, 2010

Filed:

Sep 26, 2008

Appl. No.:

12/239676

Inventors:

Michael J. Munroe - Eugene OR, US
Theodore Alekel - Portland OR, US
David A. Dutton - Corvallis OR, US
David H. Foster - Corvallis OR, US
Joseph G. LaChapelle - Philomath OR, US

Assignee:

Deep Photonics Corporation - Corvallis OR

International Classification:

H01S 3/30

US Classification:

372 6, 372 21, 372 22, 372 69, 372102

Abstract:

A fiber laser system includes a predominately single spatial mode, linearly polarized master oscillator providing a set of optical pulses and a polarization-maintaining optical isolator optically coupled to the master oscillator. The fiber laser system also includes a fiber amplifier optically coupled to the optical isolator and including a power amplifier comprising a double clad gain fiber, one or more pump lasers, and a pump coupler. The fiber laser system further includes a pulse compression stage optically coupled to the fiber amplifier. The pulse compression stage includes a volume holographic phase grating. Moreover, the fiber laser system includes a nonlinear frequency conversion stage optically coupled to the pulse compression stage.

US Patent:

7764719, Jul 27, 2010

Filed:

Jul 3, 2008

Appl. No.:

12/168022

Inventors:

Michael J. Munroe - Eugene OR, US
Theodore Alekel - Portland OR, US
David A. Dutton - Corvallis OR, US
David H. Foster - Corvallis OR, US
Joseph G. LaChapelle - Philomath OR, US

Assignee:

Deep Photonics Corporation - Bend OR

International Classification:

H01S 3/30

US Classification:

372 6, 372 22

Abstract:

A fiber laser system includes a master oscillator configured to generate linear polarized infrared laser radiation with wavelengths of 1015-1085 nm, pulses with durations of 100 ps to 10 ns, pulse train repetition rates of 1 kHz to 10 MHz, spectral bandwidth less than 0. 5 nm, and a predominately single spatial mode and a polarization-maintaining optical isolator optically coupled to the master oscillator. The fiber laser system also includes a fiber amplifier system optically coupled to the optical isolator and including a power amplifier configured to amplify the laser radiation transmitted through the optical isolator. The power amplifier includes a polarization-maintaining, large-mode-area, multiple-clad Yb-doped gain fiber having a core, an inner cladding, and at least an outer cladding, one or more diode pump lasers emitting pump light of a nominal wavelength of 976 nm, and a pump coupler configured to couple the pump light into the gain fiber.

US Patent:

7799685, Sep 21, 2010

Filed:

Oct 4, 2004

Appl. No.:

10/958866

Inventors:

Stephen E. Savas - Fremont CA, US
Songlin Xu - Fremont CA, US
David Dutton - Tracy CA, US
Andreas Kadavanich - Fremont CA, US
Rene George - San Jose CA, US

Assignee:

Mattson Technology, Inc. - Fremont CA

International Classification:

H01L 21/302
H01L 21/461

US Classification:

438689, 438637, 438725

Abstract:

In a technique for fabricating an integrated circuit to include an active device structure which supports an electrical interconnect structure, a photoresist layer is used prior to forming an electrical interconnect structure on the active device structure. The photoresist and related residues are removed by exposing the photoresist and exposed regions of the active device structure to one or more reactive species that are generated using a gas mixture including hydrogen gas, as a predominant source of the reactive species, in a plasma source such that the photoresist and residues are continuously exposed to hydrogen-based reactive species. An associated system architecture is described which provides for a substantial flow of hydrogen gas in the process chamber.

US Patent:

8630320, Jan 14, 2014

Filed:

Aug 29, 2008

Appl. No.:

12/202002

Inventors:

Michael J. Munroe - Eugene OR, US
David A. Dutton - Corvallis OR, US
Joseph G. LaChapelle - Philomath OR, US

Assignee:

Deep Photonics Corporation - Corvallis OR

International Classification:

H01S 3/30
H01S 3/10

US Classification:

372 6, 372 25

Abstract:

An apparatus for producing coherent pulsed light with a fiber-based master oscillator/fiber amplifier architecture includes a fiber-coupled mode-locked laser source. The fiber-coupled mode-locked laser source is configured to provide pulses having a pulse duration of less than 1 ns. The apparatus also includes a fiber-coupled amplitude modulator optically coupled to the fiber-coupled mode-locked laser source. The fiber-coupled amplitude modulator is capable of gate durations greater than 1 ns. The apparatus further includes a saturated fiber power amplifier optically coupled to the fiber-coupled amplitude modulator.