David Alan Ekstrom

US Patent:

20170016954, Jan 19, 2017

Filed:

Jun 10, 2016

Appl. No.:

15/179641

Inventors:

- Fremont CA, US
Christopher T. Lane - Los Gatos CA, US
David Ekstrom - Portland OR, US
Morgan T. Johnson - Beaverton OR, US
Douglas A. Preston - McMinnville OR, US

Assignee:

Translarity, Inc. - Fremont CA

International Classification:

G01R 31/28
G01R 1/04
H01L 21/67
H01L 21/66
H01L 21/683
H01L 21/677

Abstract:

Systems and methods for testing semiconductor wafers using a wafer translator are disclosed herein. In one embodiment, an apparatus for testing semiconductor dies on a wafer includes a wafer translator having a wafer-side facing toward the wafer, and an inquiry-side facing away from the wafer-side. The wafer has an active side facing the translator. The apparatus includes a peripheral seal configured to seal a space between the wafer translator and the wafer, and a valve in a fluidic communication with the space between the wafer translator and the wafer.