David R Gabriel

US Patent:

20160233059, Aug 11, 2016

Filed:

Feb 5, 2016

Appl. No.:

15/017317

Inventors:

- Moorestown NJ, US
David Gabriel - Philadelphia PA, US

International Classification:

H01J 37/32

Abstract:

A system to generate plasma to clean at least one object, the apparatus comprising a microplate with an electrode support array comprising a plurality of matched pairs of elongated dielectric barrier members connected to a plurality of electrodes, with said dielectric barrier members of said matched pair being spaced at a pre-determined non-uniform gap, a variable time scale pulsed power source electrically coupled to said electrodes to provide electrical pulses and a plurality of electronic components to control polarity of said electrical pulses, such that said pulses produce electron streamers from opposing elongated dielectric barrier members of said plurality of matched pairs and charge on a surface of said dielectric barrier member is substantially evenly distributed.