David R Trease

US Patent:

20190006143, Jan 3, 2019

Filed:

Aug 20, 2018

Appl. No.:

16/105632

Inventors:

- Milpitas CA, US
Christopher Sears - Fremont CA, US
Harsh Sinha - Santa Clara CA, US
David Trease - Milpitas CA, US
David Kaz - Oakland CA, US
Wei Ye - Milpitas CA, US

International Classification:

H01J 37/153

Abstract:

An electron-optical system for inspecting or reviewing an edge portion of a sample includes an electron beam source configured to generate one or more electron beams, a sample stage configured to secure the sample and an electron-optical column including a set of electron-optical elements configured to direct at least a portion of the one or more electron beams onto an edge portion of the sample. The system also includes a sample position reference device disposed about the sample and a guard ring device disposed between the edge of the sample and the sample position reference device to compensate for one or more fringe fields. One or more characteristics of the guard ring device are adjustable. The system also includes a detector assembly configured to detect electrons emanating from the surface of the sample.

US Patent:

20170047193, Feb 16, 2017

Filed:

Aug 8, 2016

Appl. No.:

15/231728

Inventors:

- Milpitas CA, US
Christopher Sears - Fremont CA, US
Harsh Sinha - Santa Clara CA, US
David Trease - Milpitas CA, US
David Kaz - Oakland CA, US
Wei Ye - Milpitas CA, US

International Classification:

H01J 37/153
H01J 37/147
H01J 37/20
H01J 37/244

Abstract:

An electron-optical system for inspecting or reviewing an edge portion of a sample includes an electron beam source configured to generate one or more electron beams, a sample stage configured to secure the sample and an electron-optical column including a set of electron-optical elements configured to direct at least a portion of the one or more electron beams onto an edge portion of the sample. The system also includes a sample position reference device disposed about the sample and a guard ring device disposed between the edge of the sample and the sample position reference device to compensate for one or more fringe fields. One or more characteristics of the guard ring device are adjustable. The system also includes a detector assembly configured to detect electrons emanating from the surface of the sample.

US Patent:

20160372304, Dec 22, 2016

Filed:

Mar 24, 2016

Appl. No.:

15/079046

Inventors:

- Milpitas CA, US
Gabor Toth - San Jose CA, US
David Trease - Milpitas CA, US
Rohit Bothra - Milpitas CA, US
Grace Hsiu-Ling Chen - Los Gatos CA, US
Rainer Knippelmeyer - Milpitas CA, US

International Classification:

H01J 37/28
H01J 37/244
H01J 37/10

Abstract:

A scanning electron microscopy system with improved image beam stability is disclosed. The system includes an electron beam source configured to generate an electron beam and a set of electron-optical elements to direct at least a portion of the electron beam onto a portion of the sample. The system includes an emittance analyzer assembly. The system includes a splitter element configured to direct at least a portion secondary electrons and/or backscattered electrons emitted by a surface of the sample to the emittance analyzer assembly. The emittance analyzer assembly is configured to image at least one of the secondary electrons and/or the backscattered electrons.

Address:

1714 Oak St, Alameda, CA 94501

Phone:

9492935865

VIN:

1G1RE6E4XCU122006

Make:

CHEVROLET

Model:

VOLT

Year:

2012