A linear motion assembly is provided as part of a robot for processing substrates in a vacuum. An effector assembly is mounted for linear movement on linear bearings. The end effectors are driven by cables which in turn are driven by a drive which is positioned in an adjacent pressure vessel maintained at atmospheric pressure.
Inertial Wafer Centering End Effector And Transport Apparatus
Anthony V. DiBella - Norwood MA, US Dennis Poole - Derry NH, US William Fosnight - Carlisle MA, US
Assignee:
Brooks Automation, Inc. - Chelmsford MA
International Classification:
B65H 29/00 H01L 21/683
US Classification:
41422501, 414806, 901 2, 901 30
Abstract:
A substrate transport apparatus for a processing tool. The apparatus has a drive section, a movable arm, and an end effector. The arm is operably connected to the drive section. The end effector is connected to the movable arm for holding and transporting the substrate in the processing tool. The apparatus has a substrate inertial capture edge grip connected to the end effector and arranged so that the grip effects capture and centering of the substrate onto the end effector from substrate inertia.
Martin Hosek - Lowell MA, US Tuan Ha - Randolph MA, US Christopher Hofmeister - Hampstead NH, US Dennis Poole - East Derry NH, US
International Classification:
H02K 5/128 H02K 41/02 H02K 37/02
US Classification:
310 1204, 310 46
Abstract:
A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.
Dennis Poole - Derry NH, US Christopher Hofmeister - Hampstead NH, US
Assignee:
PERSIMMON TECHNOLOGIES CORPORATION - Wakefield MA
International Classification:
B25J 11/00
US Classification:
4147491, 901 19
Abstract:
A substrate transport apparatus including a lower linearly driven effector structure with spaced paddles, and an upper linearly driven end effector structure with spaced paddles and no rotating joints above a paddle of the lower end effector structure. A drive subsystem is configured to linearly drive the lower end effector structure and to linearly drive the upper end effector structure independent of the lower end effector structure.
- Wakefield MA, US Dennis Poole - Derry NH, US Christopher Hofmeister - Hampstead NH, US
International Classification:
B25J 11/00
Abstract:
A substrate transport apparatus including a lower linearly driven effector structure with spaced paddles, and an upper linearly driven end effector structure with spaced paddles and no rotating joints above a paddle of the lower end effector structure. A drive subsystem is configured to linearly drive the lower end effector structure and to linearly drive the upper end effector structure independent of the lower end effector structure.
An apparatus includes a motor having a rotor; and a stator, where the rotor is located at least partially in a rotor receiving area of the stator, where the stator includes at least one coil winding and teeth, where the at least one coil winding is located on at least some of the teeth, where the teeth include a first set of the teeth and a second set of the teeth, where the teeth of the first set of teeth are longer in a radial direction from the rotor receiving area than the teeth of the second set of teeth.
- Wakefield MA, US Dennis Poole - Derry NH, US Christopher Hofmeister - Hampstead NH, US
International Classification:
B25J 11/00
Abstract:
A substrate transport apparatus including a lower linearly driven effector structure with spaced paddles, and an upper linearly driven end effector structure with spaced paddles and no rotating joints above a paddle of the lower end effector structure. A drive subsystem is configured to linearly drive the lower end effector structure and to linearly drive the upper end effector structure independent of the lower end effector structure.
- Wakefield MA, US Dennis Poole - Derry NH, US Christopher Hofmeister - Hampstead NH, US
International Classification:
B25J 11/00
Abstract:
A substrate transport apparatus including a lower linearly driven effector structure with spaced paddles, and an upper linearly driven end effector structure with spaced paddles and no rotating joints above a paddle of the lower end effector structure. A drive subsystem is configured to linearly drive the lower end effector structure and to linearly drive the upper end effector structure independent of the lower end effector structure.
Tillicum School Victoria Saudi Arabia 1963-1967, Oaklands Elementary School Victoria Saudi Arabia 1965-1970, Landsdowne High School Victoria Saudi Arabia 1970-1974, Malaspina International High School Nanaimo Saudi Arabia 1980-1982
Ralph Green, Robert Stock, Lynn Baird, Loretta Fraas, Arnold Carter, Secorrah Socorro, Ronald Stotzheim, Judith Reiling, Mary Prokop, Pat Gamache, Herbert Brunell