Donald K Grubbs

US Patent:

20070137063, Jun 21, 2007

Filed:

Dec 21, 2005

Appl. No.:

11/315647

Inventors:

Donald Grubbs - San Jose CA, US
Eric Hwang - San Francisco CA, US
Jinliu Wang - San Jose CA, US
Richard White - Los Altos CA, US

Assignee:

Hitachi Global Storage Technologies Netherlands, B.V. - Amsterdam

International Classification:

F26B 3/00
F26B 5/04

US Classification:

034406000, 034443000

Abstract:

The improved carbon beam deposition chamber described herein substantially reduces the accumulation of carbon film on the outer surfaces of the chamber aperture plates, thereby substantially increasing the number of disks which can be processed before system cleaning or hardware replacement is required, thereby to substantially reduce disk failure for coated disks and substantially increase carbon gun productivity.