Donald Paul Lesher

US Patent:

7928400, Apr 19, 2011

Filed:

Aug 4, 2008

Appl. No.:

12/185565

Inventors:

Yacouba Diawara - Madison WI, US
Roger D. Durst - Middleton WI, US
Sergei A. Medved - Madison WI, US
Vladislav N. Sedov - Fitchburg WI, US
Donald P. Lesher - Warren OH, US

Assignee:

Bruker AXS, Inc. - Madison WI

International Classification:

H01L 27/146
H01L 31/09

US Classification:

25037009, 25037001, 378 5, 378 6

Abstract:

A detection system for wavelength-dispersive and energy-dispersive spectrometry comprises an X-ray detector formed from a solid-state avalanche photodiode with a thin entrance window electrode that permits the efficient detection of X-rays scattered from “light” elements. The detector can be tilted relative to the incident X-rays in order to increase the detection efficiency for X-rays scattered from “heavy” elements. The entrance window may be continuous conductive layer with a thickness in the range of 5 to 10 nanometers or may be a pattern of conductive lines with “windowless” areas between the lines. A signal processing circuit for the avalanche photodiode detector includes an ultra-low noise amplifier, a dual channel discriminator, a scaler and a digital counter. A linear array of avalanche photodiode detectors is used to increase the count rate of the detection system.