Ronald L. Colvin - Gilbert AZ, US Jeff Mittendorf - Chandler AZ, US Charles J. Moretti - Scottsdale AZ, US John W. Rose - Cave Creek AZ, US Earl Blake Samuels - Scottsdale AZ, US
International Classification:
H05B 3/12
US Classification:
219553
Abstract:
Electrical resistance heater and heater assemblies are described. According to one embodiment, the heater comprises a sinusoidal heating element that provides substantially constant heating. According to another embodiment, the heater comprises a heating element and one or more press-fit coupled electrical adapters. Methods and systems are also disclosed.
Ronald L. Colvin - Gilbert AZ, US Jeff Mittendorf - Chandler AZ, US Charles J. Moretti - Scottsdale AZ, US John W. Rose - Cave Creek AZ, US Earl Blake Samuels - Scottsdale AZ, US
International Classification:
C23C 16/46 C23C 16/02
US Classification:
42725511, 118725
Abstract:
A system for processing substrates is described. In one embodiment, the system comprises a process chamber, at least one electrical resistance heater, and at least one Coanda effect gas injector.
Systems, Apparatuses, And Methods For Chemically Processing Substrates Using The Coanda Effect
Ronald L. COLVIN - Gilbert AZ, US Jeff MITTENDORF - Chandler AZ, US Charles J. MORETTI - Scottsdale AZ, US John W. ROSE - Cave Creek AZ, US Earl Blake SAMUELS - Scottsdale AZ, US
International Classification:
H01L 21/31 B05D 5/12 C23C 16/00
US Classification:
438758, 118728, 427 58, 257E2124
Abstract:
A system for processing substrates is described. In one embodiment, the system comprises a process chamber and at least one Coanda effect gas injector. The at least one Coanda effect gas injector is disposed proximate a location for the peripheral edge of the substrate so as to provide a Coanda effect gas flow over the surface of the substrate. Apparatuses and methods are also described.
Methods And Apparatuses For Depositing Uniform Layers
- Phoenix AZ, US Jeff Mittendorf - Chandler AZ, US Charles J. Moretti - Scottsdale AZ, US John W. Rose - Cave Creek AZ, US Earl Blake Samuels - Scottsdale AZ, US
Assignee:
GES Associates, L.L.C. - Phoenix AZ
International Classification:
C23C 16/455 C23C 16/46
Abstract:
A system for processing substrates is described. In one embodiment, the system comprises a process chamber, at least one electrical resistance heater, and at least one Coanda effect gas injector.