Ed E Reynolds

US Patent:

20050057102, Mar 17, 2005

Filed:

Sep 11, 2003

Appl. No.:

10/659401

Inventors:

Masahiro Totsu - Kumagaya city, JP
Andrew Hazelton - San Carlos CA, US
Ed Reynolds - Foster City CA, US
Michael Binnard - Belmont CA, US
Yoichi Arai - Belmont CA, US

Assignee:

NIKON CORPORATION - Chiyoda-ku

International Classification:

H02K041/00
H02K009/00

US Classification:

310012000, 310054000, 310058000

Abstract:

A coolant cools an object (such as, for example, a coil of a linear motor that drives a stage of an exposure apparatus) while suppressing the generation of a temperature distribution in various parts of the object being cooled by using a coolant that includes a first component and a second component dispersed in the first component, the second component increases in temperature by a lesser amount than the first component when a predetermined amount of heat is absorbed by the first and second components, respectively. The second component may be a substance that changes phase (for example, from a solid to a liquid or from a liquid to a gas) in order to absorb the predetermined amount of heat. The second component may have a higher heat capacity than the first component, and may not change phase when it absorbs heat to cool the object.

US Patent:

20050168075, Aug 4, 2005

Filed:

Jan 30, 2004

Appl. No.:

10/769307

Inventors:

Ed Reynolds - Foster City CA, US
Andrew Hazelton - San Carlos CA, US
Michael Binnard - Belmont CA, US

International Classification:

H02K041/00

US Classification:

310012000

Abstract:

A mover () for an exposure apparatus () includes a conductor array () and a circulation housing () that defines at least a portion of a fluid passageway () near the conductor array (). The circulation housing () includes a wall (A) having a wall thickness. In one embodiment, the wall thickness at a first position on the wall (A) is different than the wall thickness at a second position on the wall (A). The wall (A) can be curved and the shape of the curve is different at the first position than at the second position. Further, a cross-sectional shape of the wall (A) at the first position is different from a cross-sectional shape of the wall (A) at the second position.