Edward Henry Hill

US Patent:

6351580, Feb 26, 2002

Filed:

Mar 27, 2000

Appl. No.:

09/536877

Inventors:

Vijayakumar Rudrappa Dhuler - Raleigh NC
Edward A. Hill - Chapel Hill NC

Assignee:

JDS Uniphase Corporation - San Jose CA

International Classification:

G02B 642

US Classification:

385 19, 385 14, 385 15, 385147, 385136, 385137

Abstract:

Microelectromechanical devices may include a substrate having first and second optical fibers thereon. An optical shutter may also be provided. This optical shutter is mechanically coupled to a first plurality of arched beams that are supported at opposing ends by support structures which may be mounted on the substrate. A second plurality of arched beams are also provided on a first side of the optical shutter. These arched beams are also supported at opposing ends by support structures. A first brake member is provided that is coupled to the second plurality of arched beams. This first brake member contacts and restricts the optical shutter from moving in the Ây-direction when the second plurality of arched beams are relaxed, but releases the optical shutter when the second plurality of arched beams move in the -x direction. This ability to restrict movement of the optical shutter when the second plurality of arched beams are relaxed provides a degree of nonvolatile position retention. A third plurality of arched beams are also preferably provided on a second side of the optical shutter.

US Patent:

6360539, Mar 26, 2002

Filed:

Apr 5, 2000

Appl. No.:

09/542672

Inventors:

Edward A. Hill - Chapel Hill NC
Vijayakumar R. Dhuler - Raleigh NC
Allen B. Cowen - Morrisville NC
Ramaswamy Mahadevan - Chapel Hill NC
Robert L. Wood - Cary NC

Assignee:

JDS Uniphase Corporation - San Jose CA

International Classification:

F01B 2910

US Classification:

60528, 60527, 310306, 310307

Abstract:

Microelectromechanical actuators include a substrate, spaced apart supports on the substrate and a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof, for movement along the substrate. One or more driven arched beams are coupled to the thermal arched beam. The end portions of the driven arched beams move relative to one another to change the arching of the driven arched beams in response to the further arching of the thermal arched beam, for movement of the driven arched beams. A driven arched beam also includes an actuated element at an intermediate portion thereof between the end portions, wherein a respective actuated element is mechanically coupled to the associated driven arched beam for movement therewith, and is mechanically decoupled from the remaining driven arched beams for movement independent thereof.

US Patent:

6366186, Apr 2, 2002

Filed:

Jan 20, 2000

Appl. No.:

09/487976

Inventors:

Edward A. Hill - Chapel Hill NC
Ramaswamy Mahadevan - Chapel Hill NC

Assignee:

JDS Uniphase Inc. - San Jose CA

International Classification:

H01H 5122

US Classification:

335 78, 257421

Abstract:

A MEMS electrical cross-point switch is provided that includes a microelectronic substrate, a magnetic element attached to the microelectronic substrate that is free to move in a predetermined direction in response to a magnetic field and an electrical element connected to the magnetic element for movement therewith to selectively switch electric current. In one embodiment the magnetic element and the electrical element are connected via a tethering device that acts as a platform for the magnetic and electrical elements. The electrical cross-point switch may also comprise a clamping element that serves to lock the switch in an open or closed position to circumvent the magnetic actuation of the switch. In another embodiment, the invention provides for a MEMS electrical cross-point switching array that includes a microelectronic substrate, a magnetic field source in circuit with said microelectronic substrate, a plurality of first and second electrical lines disposed on the microelectronic substrate in an array formation, and a plurality of the in-plane MEMS electrical cross-point switches as described above disposed at the cross point of a first and second electrical line. In one embodiment the array is configured in a NÃN or NÃM array having a series of crossing first and second electrical load lines.

US Patent:

6367252, Apr 9, 2002

Filed:

Jul 5, 2000

Appl. No.:

09/610047

Inventors:

Edward A. Hill - Chapel Hill NC
Vijayakumar Rudrappa Dhuler - Raleigh NC
Allen Cowen - Morrisville NC
Ramaswamy Mahadevan - Chapel Hill NC
Robert L. Wood - Cary NC

Assignee:

JDS Uniphase Corporation - San Jose CA

International Classification:

F01B 2910

US Classification:

60528, 60527, 310306, 310307

Abstract:

In embodiments of the present invention, a microelectromechanical actuator includes a beam having respective first and second ends attached to a substrate and a body disposed between the first and second ends having a sinuous shape. The body includes a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam. The sinuous shape may be sinusoidal, e. g. , a shape approximating a single period of a cosine curve or a single period of a sine curve. The beam may be thermally actuated or driven by another actuator. In other embodiments, a rotary actuator includes first and second beams, a respective one of which has first and second ends attached to a substrate and a body disposed between the first and second ends. Each body includes first and second oppositely inflected portions. The bodies of the first and second beams intersect one another at points at which the first and second oppositely inflected portions of the first and second bodies meet.

US Patent:

6396975, May 28, 2002

Filed:

Jan 21, 2000

Appl. No.:

09/489264

Inventors:

Robert L. Wood - Cary NC
Edward A. Hill - Chapel Hill NC
Ramaswamy Mahadevan - Chapel Hill NC

Assignee:

JDS Uniphase Corporation - San Jose CA

International Classification:

G02B 626

US Classification:

385 18, 385 16

Abstract:

A microelectromechanical structure capable of switching optical signals from an input fiber to one of two or more output fibers. In one embodiment, the MEMS optical cross-connect switch comprises a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a rotational magnetic field source, such as a variably controlled magnetic field source. The rotational magnetic field source allows for reliable actuation of the pop-up mirror from a non-reflective state to a reflective state. Additionally the invention is embodied in a MEMS optical cross-connect switch having a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a positioning structure disposed in a fixed positional relationship relative to the first substrate. The positioning structure may comprise a positioning structure extending from a second microelectronic substrate that is in a fixed positional relationship relative to the first microelectronic substrate. The positioning structure serves to restrict further movement of the pop-up mirror when the pop-up mirror has been actuated into a reflective state.

US Patent:

6400550, Jun 4, 2002

Filed:

May 18, 2001

Appl. No.:

09/860213

Inventors:

Robert L. Wood - Cary NC
Vivek Agrawal - Durham NC
Ramaswamy Mahadevan - Chapel Hill NC
Edward A. Hill - Chapel Hill NC

Assignee:

JDS Uniphase Corporation - San Jose CA

International Classification:

H01G 501

US Classification:

361277, 361278, 3612982

Abstract:

A variable capacitor is provided having first and second capacitor plates, a tandem mover and an actuator. The first and second capacitor plates are positioned such that the first and second capacitor plates face one another in a spaced apart relationship. The tandem mover is configured to move the first and second capacitor plates in tandem in response to changes in ambient temperature to maintain a consistent spaced apart relationship between the capacitor plates. The actuator is then configured to vary the spaced apart relationship between the first and second capacitor plates in response to an external input. The capacitance of the variable capacitor can therefore be varied by increasing and decreasing the spaced apart relationship between the first and second capacitor plates.

US Patent:

6410361, Jun 25, 2002

Filed:

Feb 6, 2001

Appl. No.:

09/777749

Inventors:

Vijayakumar R. Dhuler - Raleigh NC
Edward Hill - Chapel Hill NC
Allen Cowen - Cary NC

Assignee:

JDS Uniphase Corporation - Research Triangle Park NC

International Classification:

H01L 2100

US Classification:

438 54, 438 52, 310307, 337 3, 337333

Abstract:

A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator of the present invention may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate. In one embodiment the composite beam comprises two or layers having materials that have correspondingly different thermal coefficients of expansion. As such, the layers will respond differently when thermal energy is supplied to the composite.

US Patent:

6428173, Aug 6, 2002

Filed:

May 3, 1999

Appl. No.:

09/304301

Inventors:

Vijayakumar R. Dhuler - Raleigh NC
Mark David Walters - Durham NC
Edward A. Hill - Chapel Hill NC
Allen Bruce Cowen - Cary NC

Assignee:

JDS Uniphase, Inc. - San Jose CA

International Classification:

G02B 508

US Classification:

359872, 359881, 359223, 359224, 359230

Abstract:

Microelectromechanical structures (MEMS) are provided that are adapted to controllably move mirrors in response to selective thermal actuation. In one embodiment, the MEMS moveable mirror structure includes a thermally actuated microactuator adapted to controllably move along a predetermined path substantially parallel to the first major surface of an underlying microelectronic substrate. A mirror is adapted to move accordingly with the microactuator between a non-actuated and an actuated position. In all positions, the mirror has a mirrored surface disposed out of plane relative to the first major surface of the microelectronic substrate. The microactuator provided herein can include various thermal arched beam actuators, thermally actuated composite beam actuators, arrayed actuators, and combinations thereof. The MEMS moveable mirror structure can also include a mechanical latch and/or an electrostatic latch for controllably clamping the mirror in position. A MEMS moveable mirror array is also provided which permits individualized control of each individual MEMS moveable mirror structure within the array.