Edwin G. Haas - Sayville NY Michael A. Peacock - Bay Shore NY Robert M. Gutowski - Glen Oaks NY
Assignee:
Advanced Energy Systems, Inc. - Bethpage NY
International Classification:
H05H 134
US Classification:
2504922, 250504 R, 31511121, 378119
Abstract:
An emitted energy system for use in photolithography may include a holder assembly operable to precisely align a diffuser and a nozzle. In accordance with one embodiment of the present invention, a holder assembly ( ) may comprise a nozzle mounting system ( ) coupled to a housing assembly ( ) to secure a nozzle ( ). A diffuser mounting system ( ) may be coupled to the housing assembly ( ) to secure a diffuser ( ). An alignment system ( ) may operate to align the nozzle ( ) and the diffuser ( ) in a spatial relationship with each other to optimize operation of the diffuser ( ) in relation to the nozzle ( ).
Fluid Nozzle System And Method In An Emitted Energy System For Photolithography
Edwin G. Haas - Sayville NY Robert M. Gutowski - Glen Oaks NY Vincent S. Calia - Greenlawn NY
Assignee:
Advanced Energy Systems, Inc. - Bethpage NY
International Classification:
H05H 134
US Classification:
2504921, 2504922
Abstract:
An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle ( ) may include a nozzle cavity ( ) disposed within a nozzle body ( ) between an up-stream end ( ) and a down-stream end ( ). A nozzle passage ( ) may be defined within the nozzle cavity ( ) and extend a longitudinal length ( ) from the down-stream end ( ) of the nozzle body ( ) into the nozzle cavity ( ). A discharge orifice ( ) may also be defined at the down-stream end ( ) of the nozzle cavity ( ) and have an associated width ( ). The width ( ) of the discharge orifice ( ) may be substantially less than the longitudinal length ( ) of the nozzle passage ( ).
System And Method For Providing A Lithographic Light Source For A Semiconductor Manufacturing Process
Edwin G. Haas - Sayville NY Robert M Gutowski - Glen Oaks NY Vincent S. Calia - Greenlawn NY
Assignee:
Advanced Energy Systems, Inc. - Medford NY
International Classification:
H05H 134
US Classification:
250365, 2504931, 2504922, 250504 R, 250372
Abstract:
A method for providing a lithographic light source is provided that includes producing a process fluid plume. A coaxial shielding fluid is produced around the process fluid plume. A plasma is generated by providing an energy source that impinges on the process fluid plume.
Edwin Gerard Haas - Sayville NY Robert Charles Schwarz - Huntington NY John M. Papazian - Great Neck NY
Assignee:
Northrop Grumman Corporation - Los Angeles CA
International Classification:
B21D 700
US Classification:
72 57, 72413, 72 38, 723421
Abstract:
A die and a stationary member of resilient gas permeable composition are adapted to receive between them a three-dimensional honeycomb core article. The die includes an array of elongated mutually parallel translating pins, each terminating at a tip end and arranged in a matrix for longitudinal movement between retracted and extended positions. The stationary member includes a receiving surface facing and laterally coextensive with the tip ends of the translating pins. The tip ends are engageable with first end surface of the article, the receiveing surface of the stationary member being engageable with a second end surface of the article. The die includes a housing movably mounting the translating pins, drive output shafts drivingly connected with each associated translating pin, a transmission for independent driving controllable interconnection of each translating pin, and a selectively energizable controller interconnecting each transmission to thereby achieve selective rotation of at least one translating pin. Each translating pin may be hollow and have planar sides which prevents its rotation by the restraining action of adjacent translating pins. A controller individually moves the translating pins in a coordinated manner into engagement with the first end surface to thereby impart a desired contour while simultaneously urging the second end surface of the honeycomb core article into engagement with the receiveing surface of the stationary member producing a contour substantially similar to the first end surface.
Edwin Gerard Haas - Sayville NY, US Ronald Beauman - Hicksville NY, US Maria Anna Palo - East Patchogue NY, US
Assignee:
U.S. Department of Energy - Washington DC
International Classification:
H01H 3/02
US Classification:
200331, 200401
Abstract:
The invention provides a device and method for actuating electrical switches remotely. The device is removably attached to the switch and is actuated through the transfer of a user's force. The user is able to remain physically removed from the switch site obviating need for protective equipment. The device and method allow rapid, safe actuation of high-voltage or high-current carrying electrical switches or circuit breakers.
Edwin G. Haas - Sayville NY, US Christopher Stelmach - Holbrook NY, US Zhong Zhong - Stony Brook NY, US
Assignee:
Brookhaven Science Associates. LLC - Upton NY
International Classification:
G21K 1/06
US Classification:
378 84
Abstract:
An x-ray focusing device and method for adjustably focusing x-rays in two orthogonal directions simultaneously. The device and method can be operated remotely using two pairs of orthogonal benders mounted on a rigid, open frame such that x-rays may pass through the opening in the frame. The added x-ray flux allows significantly higher brightness from the same x-ray source.
An optical mounting system is configured so as to locate a 360. degree. shoulder all around the optical element periphery in both the object and image sides of the optical element. The shoulder allows expansion or contraction of the optical element both in the thickness direction of the optical element and in the direction normal to the optical axis when installed in the mounting assembly. Three small metal clips are used to maintain centering of the optics, the thermal expansion and contraction of these clips being coordinated with the clip geometry so that the optical material remains centered without induced stress or free play at either room temperature or at the operating temperature.
Edwin G. Haas - Seaford NY Martin Kesselman - Commack NY
Assignee:
Grumman Aerospace Corporation - Los Angeles CA
International Classification:
B21D 3702 B21D 3714
US Classification:
72413
Abstract:
This invention details a computer controlled self adjusting sheet metal forming die which can provide rapid contour changes. It eliminates the need to manufacture, store, and change individual forming dies for forming different contours, and comprises a computer control device which sends appropriately timed signals to translate each contour element so that a three dimension surface is formed by a discrete matrix of individual pins. This self adjusting sheet metal forming die is used on a sheet metal press wherein sheet metal can be formed by pressing or stretch forming the metal against the contoured surface.