Norbert Arnold - New Hempstead NY Klaus Hummler - Poughkeepsie NY Ernest Levine - Poughkeepsie NY Rainer Weiland - Flintsbach, DE
Assignee:
Siemens Aktiengesellschaft International Business Machines Corporation
International Classification:
G01N 2300 H01J 3700
US Classification:
250307
Abstract:
A method is disclosed for locating a particular small objects (down to submicron) within an array of periodically arranged like objects utilizing a scanning tool. The method includes scanning the array for generating a plurality of pulses, which correspond to these objects contained within the array. Counting the plurality of pulses in order to locate the particular object within the array.
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