Frederick L Goodman

US Patent:

20140029016, Jan 30, 2014

Filed:

Jul 30, 2012

Appl. No.:

13/561377

Inventors:

Chunhai Wang - Pleasanton CA, US
Chunsheng Huang - San Jose CA, US
Andrew An Zeng - Fremont CA, US
Frederick Arnold Goodman - Oakland CA, US
Shouhong Tang - Santa Clara CA, US
Yi Zhang - Sunnyvale CA, US

Assignee:

KLA-Tencor Corporation - Milpitas CA

International Classification:

G01B 11/06
G02B 5/08

US Classification:

356503, 359861

Abstract:

A semiconductor measuring tool has a folding mirror configuration that directs a light beam to pass the same space multiple times to reduce the size and footprint. Furthermore, the folding mirrors may reflect the light beam at less than forty-five degrees; thereby allowing for smaller folding mirrors as compared to the prior art.

US Patent:

20160265904, Sep 15, 2016

Filed:

Mar 7, 2016

Appl. No.:

15/063057

Inventors:

- Milpitas CA, US
Chunsheng Huang - San Jose CA, US
Andrew An Zeng - Fremont CA, US
Frederick Arnold Goodman - Oakland CA, US
Shouhong Tang - Santa Clara CA, US
Yi Zhang - Sunnyvale CA, US

International Classification:

G01B 11/06
G02B 27/28
G02B 17/00
G01B 11/24
H04N 5/225

Abstract:

A semiconductor measuring tool has a folding mirror configuration that directs a light beam to pass the same space multiple times to reduce the size and footprint. Furthermore, the folding mirrors may reflect the light beam at less than forty-five degrees; thereby allowing for smaller folding mirrors as compared to the prior art.

US Patent:

20150176973, Jun 25, 2015

Filed:

Dec 9, 2011

Appl. No.:

13/316223

Inventors:

Shouhong Tang - Santa Clara CA, US
Andrew An Zeng - Fremont CA, US
Chunhai Wang - Pleasanton CA, US
Fuu-Ren Tsai - Milpitas CA, US
Frederick Arnold Goodman - Oakland CA, US
Chunsheng Huang - San Jose CA, US
Yi Zhang - Sunnyvale CA, US

Assignee:

KLA-TENCOR CORPORATION - Milpitas CA

International Classification:

G01B 11/06
G01B 9/02

Abstract:

An interferometer system is disclosed. The interferometer system includes two spaced apart reference flats having corresponding reference surfaces forming a cavity therebetween for placement of a polished opaque plate. The surfaces of the plate are approximately 2.5 millimeters or less from the corresponding reference surfaces when the plate is placed in the cavity. The interferometer system also includes two interferometer devices located on diametrically opposite sides of the cavity to map the surfaces of the plate. A light source is optically coupled to the interferometer devices. The light source includes an illuminator configured for producing light of multiple wavelengths and an optical amplitude modulator configured for stabilizing power of the light produced by the illuminator. The interferometer system further includes two interferogram detectors, and at least one computer coupled to receive the outputs of the interferogram detectors for determining thickness variations of the plate.