James E. Robinson - Dallas TX James F. Belcher - Plano TX Howard R. Beratan - Richardson TX Steven N. Frank - McKinney TX Charles M. Hanson - Richardson TX Paul O. Johnson - Allen TX Robert J. S. Kyle - Rowlett TX Edward G. Meissner - Dallas TX Robert A. Owen - Rowlett TX Gail D. Shelton - Mesquite TX William K. Walker - Plano TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01R 4300
US Classification:
29825
Abstract:
A thermal detection system (10) includes a focal plane array (12), a thermal isolation structure (14), and an integrated circuit substrate (16). Focal plane array (12) includes thermal sensors (28), each having an associated thermal sensitive element (30). Thermal sensitive element (30) is coupled with one side to infrared absorber and common electrode assembly (36) and on the opposite side to an associated contact pad (20) disposed on the integrated circuit substrate (16). Reticulation kerfs (52a, 52b) separate adjacent thermal sensitive elements (30a, 30b, 30c) by a distance at least half the average width (44, 46) of a single thermal sensitive element (30a, 30b, 30c). A continuous, non-reticulated optical coating (38) may be disposed over thermal sensitive elements (30a, 30b, 30c) to maximize absorption of thermal radiation incident to focal plane array (12).
Thermal Detector Apparatus And Method Using Reduced Thermal Capacity
James E. Robinson - Dallas TX James F. Belcher - Plano TX Howard R. Beratan - Richardson TX Steven N. Frank - McKinney TX Charles M. Hanson - Richardson TX Paul O. Johnson - Allen TX Robert J. S. Kyle - Rowlett TX Edward G. Meissner - Dallas TX Robert A. Owen - Rowlett TX Gail D. Shelton - Mesquite TX William K. Walker - Plano TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
G01J 506
US Classification:
250332
Abstract:
A thermal detection system (10) includes a focal plane array (12), a thermal isolation structure (14), and an integrated circuit substrate (16). Focal plane array (12) includes thermal sensors (28), each having an associated thermal sensitive element (30). Thermal sensitive element (30) is coupled with one side to infrared absorber and common electrode assembly (36) and on the opposite side to an associated contact pad (20) disposed on the integrated circuit substrate (16). Reticulation kerfs (52a, 52b) separate adjacent thermal sensitive elements (30a, 30b, 30c) by a distance at least half the average width (44, 46) of a single thermal sensitive element (30a, 30b, 30c). A continuous, non-reticulated optical coating (38) may be disposed over thermal sensitive elements (30a, 30b, 30c) to maximize absorption of thermal radiation incident to focal plane array (12).
Ronnie Yocum, Dennis Hagins, Fran Smith, Barbara Williford, Connie Cook, Doyle Wood, Barbara Ratley, Cathy Wiggs, Carol Garland, Donna Davis, Janice Buie