Gary K Li

US Patent:

20220324704, Oct 13, 2022

Filed:

Apr 8, 2021

Appl. No.:

17/226071

Inventors:

- Beijing, CN
Yufeng Wang - Mountain View CA, US
Qin Zhou - Mountain View CA, US
Gary Li - Mountain View CA, US

Assignee:

BEIJING VOYAGER TECHNOLOGY CO., LTD. - Beijing

International Classification:

B81C 99/00
G01S 7/481
G02B 26/08

Abstract:

Embodiments of the disclosure provide a method for designing an optical scanning mirror. The method may include receiving an initial set of design parameters for the scanning mirror assembly. The method may also include simulating first scanning mirror oscillation based on the initial set of design parameters to compute an initial non-linear spring constant associated with at least one spring of the scanning mirror assembly. The method may further include adjusting the set of design parameters for the scanning mirror assembly based on a comparison between the initial non-linear spring constant and a target non-linear spring constant. The method may also include outputting the at least one structural alteration to be implemented on the at least one spring. In certain aspects, the initial set of design parameters and the adjusted set of design parameters may be associated with a same mirror oscillation frequency and linear spring constant.

US Patent:

20220326511, Oct 13, 2022

Filed:

Apr 9, 2021

Appl. No.:

17/226667

Inventors:

- Beijing, CN
Yufeng Wang - Mountain View CA, US
Qin Zhou - Mountain View CA, US
Gary Li - Mountain View CA, US

Assignee:

BEIJING VOYAGER TECHNOLOGY CO., LTD. - Beijing

International Classification:

G02B 26/10
G01S 17/08
G01S 7/481

Abstract:

Embodiments of the disclosure provide a scanning mirror assembly for an optical sensing system. The scanning mirror assembly may include a scanning mirror configured to rotate around an axis of rotation. The scanning mirror assembly may further include a plurality of torsion springs coupled to at least one side of the scanning mirror along the axis of rotation. In certain aspects, the plurality of torsion springs may collectively have a non-linear spring constant and a linear spring constant. In certain other aspects, a ratio of the non-linear spring constant over the linear spring constant may meet a predetermined threshold.

US Patent:

20220284139, Sep 8, 2022

Filed:

Mar 4, 2021

Appl. No.:

17/192724

Inventors:

- Beijing, CN
Yufeng Wang - Mountain View CA, US
Gary Li - Mountain View CA, US

Assignee:

BEIJING VOYAGER TECHNOLOGY CO., LTD. - Beijing

International Classification:

G06F 30/10

Abstract:

Embodiments of the disclosure provide a method for designing an optical scanning mirror. The method may include receiving, by a communication interface, a set of design parameters of the scanning mirror. The method may also include simulating scanning mirror oscillation, by at least one processor, based on the set of design parameters using a computer model. In certain aspects, the computer model may include a lookup table that correlates electrostatic force applied to a sample scanning mirror and angular displacement in the sample scanning mirror caused by the electrostatic force. The method may further include generating, by the at least one processor, mirror oscillation data as an output of the computer model for designing the scanning mirror. The mirror oscillation data may include a correlation of drive frequency, angular displacement, and time.

US Patent:

20220252867, Aug 11, 2022

Filed:

Feb 9, 2021

Appl. No.:

17/172047

Inventors:

- Beijing, CN
Yufeng Wang - Mountain View CA, US
Gary Li - Mountain View CA, US

Assignee:

BEIJING VOYAGER TECHNOLOGY CO., LTD. - Beijing

International Classification:

G02B 26/10
G02B 26/08
G01S 7/481

Abstract:

Embodiments of the disclosure provide a scanner for steering optical beams. In certain configurations, the scanner may include a scanning mirror independently rotatable around a first axis and a second axis. In certain other configurations, the scanner may also include a first driver configured to drive the scanning mirror to rotate around the first axis. In still other configurations, the scanner may further include a second driver configured to drive the scanning mirror to simultaneously rotate around the second axis. In certain aspects, the first driver and the second driver may be different types of drivers.

US Patent:

20210396849, Dec 23, 2021

Filed:

Jun 18, 2020

Appl. No.:

16/905248

Inventors:

- Beijing, CN
Yufeng Wang - Mountain View CA, US
Qin Zhou - Livermore CA, US
Gary Li - Mountain View CA, US
Sergio Fabian Almeida Loya - Mountain View CA, US

International Classification:

G01S 7/481
G01S 17/931
B81B 3/00
G02B 1/11

Abstract:

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

US Patent:

20210396850, Dec 23, 2021

Filed:

Jun 18, 2020

Appl. No.:

16/905254

Inventors:

- Beijing, CN
Yufeng Wang - Mountain View CA, US
Qin Zhou - Livermore CA, US
Gary Li - Mountain View CA, US

International Classification:

G01S 7/481
G01S 17/931
B81B 3/00
B81C 1/00
G02B 1/11

Abstract:

In one example, an apparatus that is part of a Light Detection and Ranging (LiDAR) module of a vehicle comprises a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate. The MEMS comprises an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror having a first thickness; and an actuator comprising first fingers and second fingers, the first fingers being connected with the substrate, the second fingers being mechanically connected to the micro-mirror having a second thickness smaller than the first thickness, the actuator being configured to generate an electrostatic force between the first fingers and the second fingers to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver.

US Patent:

20210396852, Dec 23, 2021

Filed:

Jun 18, 2020

Appl. No.:

16/905489

Inventors:

- Beijing, CN
Yufeng Wang - Mountain View CA, US
Qin Zhou - Livermore CA, US
Gary Li - Mountain View CA, US

International Classification:

G01S 7/481
G02B 26/10
B81B 3/00

Abstract:

A Light Detection and Ranging (LiDAR) module for a vehicle can include a semiconductor integrated circuit with a microelectromechanical system (MEMS) and a substrate, the MEMS comprising a micro-mirror assembly including a mirror and a gimbal structure. The gimbal can be configured concentrically around and coplanar with the mirror. When rotated, the gimbal drives the mirror to oscillate at or near a resonant frequency and is coupled to the mirror via mirror-gimbal connectors. A support structure can be coupled to a backside of the mirror and gimbal structures and can increase the stiffness of the mirror to help the mirror better resist dynamic deformation. To limit the added rotational moment of inertia, the support structure can be etched to form a matrix of cells (e.g., formed by a mesh of circumferential and radial ridges) such that up to approximately 90% of the support structure material forming the support structure is removed.

US Patent:

20210396992, Dec 23, 2021

Filed:

Jun 18, 2020

Appl. No.:

16/905496

Inventors:

- Beijing, CN
Yufeng Wang - Mountain View CA, US
Gary Li - Mountain View CA, US

International Classification:

G02B 26/08
G02B 26/10
G01S 7/481
G01S 17/89
G01S 17/931

Abstract:

A Light Detection and Ranging (LiDAR) module for a vehicle includes a semiconductor integrated circuit including a microelectromechanical system (MEMS) and a substrate, the MEMS comprising a mirror structure having an axis of rotation and at least one torsion spring coupled to the mirror structure that is collinear with the axis of rotation of the mirror structure and configured to provide a rotational force that causes the mirror structure to oscillate on the axis of rotation. The MEMS further includes at least one comb spine protruding from and coplanar with the mirror structure that is longitudinally parallel to and not collinear with the axis of rotation, and a plurality of comb electrodes protruding normal to the comb spine(s) that form an electrostatic comb drive that is configured to generate an electrostatic force that further causes the mirror structure to oscillate at the resonant frequency on the axis of rotation.