George Allen Powers

US Patent:

60474807, Apr 11, 2000

Filed:

Apr 13, 1998

Appl. No.:

9/058929

Inventors:

George S. Powers - Austin TX

Assignee:

Motorola, Inc. - Schaumburg IL

International Classification:

G01B 731
B23Q 300

US Classification:

33645

Abstract:

Alignment of a blade (60) to an electrostatic chuck (53) is accomplished using an alignment tool (30) and an alignment pin (40) to align a port (534) in the electrostatic chuck (53) directly to a hole (602) in the blade (60). Placement of a substrate (70) in a processing chamber (50) is accomplished using a substrate handler configured with the blade (60) to place the substrate (70) accurately on the electrostatic chuck (53). The substrate (70) is then processed in the processing chamber (50) using the electrostatic chuck (53).