Gil Delgado

US Patent:

7705331, Apr 27, 2010

Filed:

Jun 29, 2007

Appl. No.:

11/771430

Inventors:

Greg Kirk - Pleasanton CA, US
Rich Solarz - Danville CA, US
Chris Kirk - Beaconsfield, GB
Gil Delgado - Livermore CA, US
Jim Li - San Jose CA, US
Qibiao Chen - Fremont CA, US
Charles Nenghe Wang - Santa Clara CA, US

Assignee:

KLA-Tencor Technologies Corp. - Milpitas CA

International Classification:

G21G 4/00

US Classification:

2504931, 250306, 250307

Abstract:

Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.

US Patent:

7138640, Nov 21, 2006

Filed:

Oct 16, 2003

Appl. No.:

10/688839

Inventors:

Gil Delgado - Livermore CA, US
John McMurtry - Menlo Park CA, US
James Wiley - Menlo Park CA, US

Assignee:

KLA-Tencor Technologies, Corporation - Milpitas CA

International Classification:

G01J 1/42

US Classification:

250372

Abstract:

The invention pertains to mechanisms for protecting surfaces of optical components of an optical inspection system. One aspect of the invention relates to a gas purge system that produces a gas stream that blocks contaminants from reaching the optical surfaces of the optical components and that transports contaminants away from the optical surfaces of the optical components. Another aspect of the invention relates to a transparent cover that physically blocks contaminants from reaching the optical surfaces of the optical components. Yet another aspect of the invention relates to a combination of the gas purge system and the transparent cover.