Michael V. Spangler - Soap Lake WA, US Glen Stucki - Bellingham WA, US
International Classification:
C01B 33/021 F27B 15/14
US Classification:
423349, 422146
Abstract:
Silicon granules are produced by chemical vapor deposition on seed particles inside a chamber within a fluidized bed reactor. The chamber contains an obstructing member, or bubble breaker, which is sized and shaped to restrict the growth of bubbles inside the chamber and which has interior passageways through which a heated fluid passes to transfer heat to gas inside the chamber.
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