Gordon L Hill

US Patent:

7369920, May 6, 2008

Filed:

Mar 21, 2006

Appl. No.:

11/387042

Inventors:

Vladislav Davidkovich - Stoneham MA, US
Gordon Hill - Arlington MA, US
Dave Chamberlain - Hooksett NH, US
Paul Lucas - Melrose MA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

G06F 19/00
F04B 40/06
H01L 21/306
C16C 16/52

US Classification:

700282, 417 42, 417 441, 700121, 700275, 700281, 137145

Abstract:

A pressure control system for controlling pressure of a fluid in a chamber includes a pressure sensor configured to measure the pressure of the fluid in the chamber, and a valve configured to control the pressure of the fluid in the chamber by regulating flow of the fluid from the chamber. The pressure control system further includes a controller. The controller is configured to estimate the volume of the chamber, and to generate a pump speed curve of the valve. The controller is further configured to monitor and modify the pump speed curve so as to maintain a slope of the pump speed curve to at least a minimum value, and to use the modified pump speed curve to adjust the position of the valve in response to pressure measurements by the pressure sensor, so as to maintain the pressure in the chamber at a desired pressure setpoint.

US Patent:

7643909, Jan 5, 2010

Filed:

Mar 30, 2006

Appl. No.:

11/278071

Inventors:

David J. Goldman - North Andover MA, US
Martin Ryan - Reading MA, US
Vladislav Davidkovich - Stoneham MA, US
Gordon Hill - Arlington MA, US

Assignee:

MKS Instruments, Inc. - Wilmington MA

International Classification:

G06F 19/00

US Classification:

700282, 251 3005

Abstract:

A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.

US Patent:

7950294, May 31, 2011

Filed:

Jun 20, 2008

Appl. No.:

12/143106

Inventors:

Vladislav Davidkovich - Stoneham MA, US
Gordon Hill - Arlington MA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

G01L 3/00

US Classification:

7386208, 73168

Abstract:

A valve system includes a valve and a controller that controls the valve. The valve includes a valve body, and a motor configured to deliver a torque to the valve body to cause the valve body to move between an open position and a closed position. The controller is configured to drive the motor by applying a current to the motor. The controller is configured to measure the torque delivered by the motor to the valve body, compare the calculated torque with a threshold value, and diagnose a need by the valve system for preventive maintenance when the calculated torque is substantially equal to the threshold value. The threshold value represents substantially the maximum amount of torque available from the stepper motor.

US Patent:

8037896, Oct 18, 2011

Filed:

Jan 17, 2006

Appl. No.:

11/333142

Inventors:

Ali Shajii - Canton MA, US
Siddharth P. Nagarkatti - Acton MA, US
Gordon Hill - Arlington MA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

F16K 31/02

US Classification:

1374875, 13759616, 13759909, 13760101, 13760114, 137870

Abstract:

A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.

US Patent:

8525138, Sep 3, 2013

Filed:

Feb 9, 2011

Appl. No.:

13/024027

Inventors:

Donald K. Smith - Boston MA, US
Matthew Besen - Andover MA, US
Huiling Zhu - Lexington MA, US
Daniil Stolyarov - Reading MA, US
Hongke Ye - Chelmsford MA, US
Gordon Hill - Arlington MA, US
Ron Collins - Londonderry NH, US

Assignee:

Energetiq Technology, Inc. - Woburn MA

International Classification:

G01J 1/00

US Classification:

2505031, 250504 R, 313567

Abstract:

An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

US Patent:

20040034581, Feb 19, 2004

Filed:

Jun 3, 2003

Appl. No.:

10/453451

Inventors:

Gordon Hill - Arlington MA, US
John Lloyd - Hull MA, US
Lawrence Hill - Eastham MA, US
Matthew Besen - Andover MA, US

International Classification:

G06F017/60

US Classification:

705/028000

Abstract:

An inventory control and communication system provides automated real-time control of stock levels and ordering in a timely manner so that optimal stock levels are maintained. An inventory sensor that includes a storage unit, or bin, for each stock item or inventory object. One or more transducers are associated with each storage unit to produce a mass/weight signal indicative of the weight of the stock items stored in or at the corresponding storage unit. The signals are transmitted to a computer associated with the inventory sensor, which determines the weight and the number of the inventory objects present in the bin and provides this data as part of the inventory data associated with the inventory object. The inventory data is provided to a host computer that maintains information about the inventory sensor location and the corresponding stock item, such as item weight and supplier information. Threshold values for the minimum and maximum quantity of each stock item are also maintained by the host computer. When the quantity of a stock item reaches the minimum threshold, the host comptuer is operative to send an order to the supplier to restore the stock item to the maximum quantity threshold, or otherwise indicates that a reorder is needed.

US Patent:

20080183599, Jul 31, 2008

Filed:

Jan 4, 2008

Appl. No.:

12/006797

Inventors:

Gordon W. Hill - Arlington MA, US
John D. Lloyd - Hull MA, US
Lawrence W. Hill - North Eastham MA, US
Matthew M. Besen - Andover MA, US

Assignee:

VISIBLE INVENTORY, INC. - Salem NH

International Classification:

G06Q 10/00

US Classification:

705 28

Abstract:

An inventory control and communication system provides automated real-time control of stock levels and ordering in a timely manner so that optimal stock levels are maintained. An inventory sensor that includes a storage unit, or bin, for each stock item or inventory object. One or more transducers are associated with each storage unit to produce a mass/weight signal indicative of the weight of the stock items stored in or at the corresponding storage unit. The signals are transmitted to a computer associated with the inventory sensor, which determines the weight and the number of the inventory objects present in the bin and provides this data as part of the inventory data associated with the inventory object. The inventory data is provided to a host computer that maintains information about the inventory sensor location and the corresponding stock item, such as item weight and supplier information. Threshold values for the minimum and maximum quantity of each stock item are also maintained by the host computer. When the quantity of a stock item reaches the minimum threshold, the host computer is operative to send an order to the supplier to restore the stock item to the maximum quantity threshold, or otherwise indicates that a reorder is needed.

US Patent:

20090137192, May 28, 2009

Filed:

Nov 28, 2007

Appl. No.:

11/946388

Inventors:

Hossein Zarrin - Winchester MA, US
Gordon Hill - Arlington MA, US
Anil Mavanur - Littleton MA, US

Assignee:

MKS Instruments, Inc. - Wilmington MA

International Classification:

B24B 7/00

US Classification:

451 66, 60420, 137625

Abstract:

A pressure control system that controls the pressure of a fluid in a plurality of zones includes a distribution manifold, at least one main manifold connected to the distribution manifold, and at least one disposable manifold connected to the distribution manifold and the main manifold. The disposable manifold is adapted to be replaced independent of the distribution manifold and the main manifold, and is connected to each zone and to at least one vacuum source. The distribution manifold distributes the fluid to the plurality of zones, so as to cause flow of the fluid into and out of a measurement chamber located within each zone. The main manifold includes, for each zone, a pressure sensor configured to measure pressure in the measurement chamber in that zone, and a control valve configured to regulate the flow of the fluid through that zone.