Gordon R Nelson

US Patent:

6723174, Apr 20, 2004

Filed:

Jun 5, 2002

Appl. No.:

10/163837

Inventors:

Gordon Ray Nelson - Kalispell MT
Daniel P. Bexten - Kalispell MT
Jeffry A. Davis - Kalispell MT

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

B08B 302

US Classification:

134 33, 414811, 414937

Abstract:

An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process bay: A process robot moves between the indexer bay and process bay to carry semi-conductor wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Semiconductor wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.

US Patent:

6942738, Sep 13, 2005

Filed:

Jul 7, 2000

Appl. No.:

09/612009

Inventors:

Gordon Ray Nelson - Kalispell MT, US
Daniel P. Bexten - Kalispell MT, US
Jeffry A. Davis - Kalispell MT, US

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

B08B003/02

US Classification:

134 33, 41441603, 41441608, 414937

Abstract:

An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process bay. A process robot moves between the indexer bay and process bay to carry semi-conductor wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Semiconductor wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.

US Patent:

7144459, Dec 5, 2006

Filed:

Jul 19, 2002

Appl. No.:

10/200072

Inventors:

Raymon Thompson - Kalispell MT, US
Gordon Nelson - Kalispell MT, US

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

B05B 3/00

US Classification:

118323, 118731, 118 52

Abstract:

A machine for processing a flat workpiece or wafer has a head, which spins the wafer between upper and lower weirs in a base. The head is spaced apart from the base by an air gap. A vacuum source attached to an exhaust opening in the base draw air through the air gap, to reduce or eliminate movement of process chemicals into the head. Corrosion of head components by process chemicals is reduced. The disadvantages of having a mechanical seal between the base and the head are also eliminated.

US Patent:

7278813, Oct 9, 2007

Filed:

Dec 30, 2002

Appl. No.:

10/334688

Inventors:

Jeffry A. Davis - Kalispell MT, US
Gordon Ray Nelson - Kalispell MT, US
Daniel P. Bexten - Kalispell MT, US

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

B65G 49/07

US Classification:

41441603, 41441408, 414937

Abstract:

An automated processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress wafers or articles. Process chambers are located in the process bay. A transfer robot moves wafers from a pod unsealed at a docking station into a carrier at a transfer station. The carrier has tapered or stepped outside surfaces engaging corresponding inside surfaces on a rotor within a process chamber. A process robot moves between the indexer bay and process bay to carry wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.

US Patent:

8028978, Oct 4, 2011

Filed:

Mar 25, 2003

Appl. No.:

10/397946

Inventors:

Gordon R. Nelson - Kalispell MT, US
Jeffry A. Davis - Kalispell MT, US
Raymon F. Thompson - Kalispell MT, US
Eric J. Bergman - Kalispell MT, US

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

B23P 19/00

US Classification:

269903, 41422204, 34 58, 1187285

Abstract:

A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.

US Patent:

20020051699, May 2, 2002

Filed:

Jul 13, 2001

Appl. No.:

09/905677

Inventors:

Gordon Nelson - Kalispell MT, US
Jeffry Davis - Kalispell MT, US

International Classification:

B65G001/00

US Classification:

414/217100

Abstract:

A processor has a door system for opening and closing a process chamber. The door system includes a closure plate on an actuator supported by a mounting plate. The actuator moves the closure plate into engagement with an open front end of the chamber, to seal the chamber. Lift actuators raise and lower the mounting plate carrying the closure plate between a loading position and a chamber engagement position. The mounting plate has a center section supporting the closure plate actuator, and narrower legs extending from the center section to the lift actuators. A separate door cover is attached to the mounting plate. Visual inspection of the alignment of the closure plate and chamber is improved, better facilitating manufacture and maintenance of the processor. The lift actuators preferably have a piston within a cylinder magnetically coupled to the mounting plate, to reduce or eliminate leakage from the cylinders.

US Patent:

20050224103, Oct 13, 2005

Filed:

Apr 2, 2005

Appl. No.:

11/097950

Inventors:

Kert Dolechek - Kalispell MT, US
Ronald Breese - Whitefish MT, US
Gordon Nelson - Kalispell MT, US

International Classification:

B08B003/02

US Classification:

134148000, 13416600R, 13416900R, 134153000

Abstract:

A system for centrifugally cleaning containers used for holding wafers can easily be loaded and unloaded. A rotor in the system has a first plate above a second plate, and box holding positions between the plates. Spray nozzles are positioned to spray a cleaning liquid towards the rotor. A gate is moveable vertically between an up position, for loading and unloading a box into the box holding position, and a down position, for securing a box in place during centrifugal cleaning. Door holding positions are also provided between the plates, for holding container doors.

US Patent:

20120073527, Mar 29, 2012

Filed:

Sep 23, 2011

Appl. No.:

13/242239

Inventors:

Bret Allen Oltmans - Stacy MN, US
Chad Michael Slater - Osceda WI, US
Daniel Joseph Nugteren - Stacy MN, US
George Jay Mckoskey - Forest Lake MN, US
Gordon Raymond Nelson - Cambridge MN, US
David Andrew Galsworthy - Wyoming MN, US
Blake Andrew Anderson - Lindstrom MN, US

Assignee:

Polaris Industries Inc. - Medina MN

International Classification:

F01P 5/10
F01M 1/02

US Classification:

123 4147

Abstract:

An engine is described having a crankcase, a liner and a head assembly. The crankcase is split along a plane defining a two part crankcase, where fluid passages are passing through only one of the crankcase portions, so as to not require crossing the split line. A connecting rod also includes a tapered end, and the piston has a complementary carrier receiving the connecting rod.