Gregory B Jacob

US Patent:

20220252862, Aug 11, 2022

Filed:

Feb 3, 2022

Appl. No.:

17/591898

Inventors:

- San Jose CA, US
Alexander Payne - Ben Lommond CA, US
Lars Eng - Los Altos CA, US
James Hunter - Campbell CA, US
Tianbo Liu - San Jose CA, US
Gregory Jacob - Santa Clara CA, US

Assignee:

SILICON LIGHT MACHINES CORPORATION - San Jose CA

International Classification:

G02B 26/02
G03F 7/20

Abstract:

Spatial light modulators (SLMs) and systems using same are described. Generally, the system includes a laser, a fixture holding a workpiece to be processed using the laser, illumination optics to illuminate the SLM with laser light, imaging optics to focus modulated light from the SLM onto the workpiece, and a controller to control the laser, the SLM, imaging optics and the fixture to scan the modulated light across a workpiece surface. The SLM includes an array of microelectromechanical system based diffractors, each including an electrostatically deflectable member coupled to a first light reflective surface and to bring light reflected from the first light reflective surface into interference with light reflected from a second light reflective surface in the SLM. The controller is operable to provide analog gray-scale control of an intensity of modulated light reflected from each diffractor by controlling an electrostatic force generated by a driver coupled thereto.

US Patent:

20220252866, Aug 11, 2022

Filed:

Feb 3, 2022

Appl. No.:

17/591834

Inventors:

- San Jose CA, US
Gregory Jacob - Santa Clara CA, US

International Classification:

G02B 26/08
G02B 26/02

Abstract:

Microelectromechanical systems (MEMS) based spatial light modulators (SLMs) enclosed in a package filled with a gas to enhance the reliability and lifetime of the SLM, and methods for operating the same in various applications are described. Generally, the SLM includes a number of MEMS modulators, each including a number of light reflective surfaces, at least one light reflective surface coupled to an electrostatically deflectable element suspended above a substrate, and each adapted to reflect and modulate a light beam incident thereon. The package enclosing the SLM includes an optically transparent cover through which the reflective surfaces are exposed to the light beam, and a cavity is filled a low molar mass fill gas having an atomic number of two or less and a thermal conductivity of greater than 100 mW/(mK). The SLM can include electrostatically deflectable ribbons suspended over a substrate, or a linear array of two-dimensional MEMS modulators.