Gregory F Meyers

US Patent:

7066801, Jun 27, 2006

Filed:

Feb 21, 2003

Appl. No.:

10/369628

Inventors:

Sudhakar Balijepalli - Midland MI, US
Dale J. Aldrich - Lake Jackson TX, US
Laura A. Grier - Brazoria TX, US
Bedri Erdem - Pearland TX, US
Gregory F. Meyers - Midland MI, US

Assignee:

Dow Global Technologies, Inc. - Midland MI

International Classification:

B24D 11/00

US Classification:

451526, 451 41, 451529, 483691

Abstract:

Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/mto 1200 kg/m.

US Patent:

7617719, Nov 17, 2009

Filed:

Nov 30, 2006

Appl. No.:

11/606695

Inventors:

Chanmin Su - Ventura CA, US
Craig Prater - Goleta CA, US
Gregory F. Meyers - Midland MI, US
Bryant R. LaFreniere - Midland MI, US

Assignee:

The Dow Chemical Company - Midland MI
Veeco Instruments Inc. - Plainview NY

International Classification:

G01B 5/28

US Classification:

73105

Abstract:

A method and apparatus for its practice are provided of differentiating at least one component of a heterogeneous sample from other component(s) using harmonic resonance imaging and of obtaining information regarding the sample from the differentiation. In a preferred embodiment, an image is created of a property of a harmonic or a combination of a harmonics producing a response having a contrast factor between the sample's constituent components. The desired harmonic(s) can be identified either in a preliminary data acquisition procedure on the sample or, if the sample's constituent components are known in advance, predetermined. The desired harnonic(s) may be identified directly by the user or automatically through, e. g. , pattern recognition. A compositional map may then be generated and displayed and/or additional information about the sample may be obtained.