Gregory Allen Meyers

US Patent:

7066801, Jun 27, 2006

Filed:

Feb 21, 2003

Appl. No.:

10/369628

Inventors:

Sudhakar Balijepalli - Midland MI, US
Dale J. Aldrich - Lake Jackson TX, US
Laura A. Grier - Brazoria TX, US
Bedri Erdem - Pearland TX, US
Gregory F. Meyers - Midland MI, US

Assignee:

Dow Global Technologies, Inc. - Midland MI

International Classification:

B24D 11/00

US Classification:

451526, 451 41, 451529, 483691

Abstract:

Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/mto 1200 kg/m.